Patents by Inventor Reza MAHMOODI BARAM

Reza MAHMOODI BARAM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device manufacturing method
    Patent number: 11061336
    Abstract: A device manufacturing method includes: exposing a first substrate using a lithographic apparatus to form a patterned layer having first features; processing the first substrate to transfer the first features into the first substrate; determining displacements of the first features from their nominal positions in the first substrate; determining a correction to at least partly compensate for the displacements; and exposing a second substrate using a lithographic apparatus to form a patterned layer having the first features, wherein the correction is applied for or during the exposing the second substrate.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: July 13, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Hubertus Johannes Gertrudus Simons, Everhardus Cornelis Mos, Xiuhong Wei, Reza Mahmoodi Baram, Hadi Yagubizade, Yichen Zhang
  • DEVICE MANUFACTURING METHOD
    Publication number: 20200081353
    Abstract: A device manufacturing method includes: exposing a first substrate using a lithographic apparatus to form a patterned layer having first features; processing the first substrate to transfer the first features into the first substrate; determining displacements of the first features from their nominal positions in the first substrate; determining a correction to at least partly compensate for the displacements; and exposing a second substrate using a lithographic apparatus to form a patterned layer having the first features, wherein the correction is applied for or during the exposing the second substrate.
    Type: Application
    Filed: March 28, 2018
    Publication date: March 12, 2020
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Hubertus Johannes Gertrudus SIMONS, Everhardus Cornelis MOS, Xiuhong WEI, Reza MAHMOODI BARAM, Hadi YAGUBIZADE, Yichen ZHANG