Patents by Inventor Rhuzi Zhang

Rhuzi Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Antireflective coating composition
    Patent number: 7989144
    Abstract: The present invention relates to an antireflective composition comprising a thermal acid generator and an epoxy polymer comprising at least one unit of structure 1, at least one unit of structure 2, where, R1 to R12 are independently selected from hydrogen and C1-C4 alkyl, structure 1 has a configuration selected from cis, trans or mixture thereof, and x and y are the mole % of the monomeric units in the polymer. The invention also relates to a process for manufacturing a microelectronic device.
    Type: Grant
    Filed: April 1, 2008
    Date of Patent: August 2, 2011
    Assignee: AZ Electronic Materials USA Corp
    Inventors: M. Dalil Rahman, David Abdallah, Rhuzi Zhang, Douglas McKenzie
  • Antireflective Coating Composition
    Publication number: 20090246691
    Abstract: The present invention relates to an antireflective composition comprising a thermal acid generator and an epoxy polymer comprising at least one unit of structure 1, at least one unit of structure 2. where, R1 to R12 are independently selected from hydrogen and C1-C4 alkyl, structure. 1 has a configuration selected from cis, trans or mixture thereof, and x and y are the mole % of the monomeric units in the polymer. The invention also relates to a process for manufacturing a microelectronic device.
    Type: Application
    Filed: April 1, 2008
    Publication date: October 1, 2009
    Inventors: M. Dalil Rahman, David Abdallah, Rhuzi Zhang, Douglas McKenzie