Patents by Inventor Riad E. El-Choueiry

Riad E. El-Choueiry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arc detection
    Patent number: 8334700
    Abstract: An arc detection system for a plasma generation system includes a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber. A correlation module generates an arc detect signal based on the first and second signals. The arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc.
    Type: Grant
    Filed: March 19, 2010
    Date of Patent: December 18, 2012
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Riad E. El-Choueiry
  • Arc Detection
    Publication number: 20100201370
    Abstract: An arc detection system for a plasma generation system includes a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber. A correlation module generates an arc detect signal based on the first and second signals. The arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc.
    Type: Application
    Filed: March 19, 2010
    Publication date: August 12, 2010
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: David J. Coumou, Riad E. El-Choueiry