Patents by Inventor Ricardo M. Ramirez

Ricardo M. Ramirez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for desorbing molecules from chamber walls
    Patent number: 10578510
    Abstract: Embodiments include devices and methods for desorbing molecules from a chamber wall. In an embodiment, a desorption device includes several light emitting diodes (LEDs) mounted on a substrate having a wafer form factor. The LEDs may emit ultraviolet (UV) radiation, such as UV radiation in a UV C range. In an embodiment, the LEDs are thermally coupled to a heat exchanger, such as a thermoelectric cooling device. The emitted radiation may uniformly irradiate a chamber wall to desorb water molecules from the chamber wall. Other embodiments are also described and claimed.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: March 3, 2020
    Assignee: Applied Materials, Inc.
    Inventor: Ricardo M. Ramirez
  • DEVICE FOR DESORBING MOLECULES FROM CHAMBER WALLS
    Publication number: 20180149547
    Abstract: Embodiments include devices and methods for desorbing molecules from a chamber wall. In an embodiment, a desorption device includes several light emitting diodes (LEDs) mounted on a substrate having a wafer form factor. The LEDs may emit ultraviolet (UV) radiation, such as UV radiation in a UV C range. In an embodiment, the LEDs are thermally coupled to a heat exchanger, such as a thermoelectric cooling device. The emitted radiation may uniformly irradiate a chamber wall to desorb water molecules from the chamber wall. Other embodiments are also described and claimed.
    Type: Application
    Filed: November 28, 2016
    Publication date: May 31, 2018
    Inventor: Ricardo M. Ramirez