Abstract: A robotic coupling joint system and method are discussed herein, which may be utilized with a daylighting system or photovoltaic system to track sunlight. The system may provide a spherical joint allowing axial motion about two or more axes of the spherical joint. The joint comprises a first plate with four or more sockets, a second plate, a connector, and one or more spheres positioned between the first and second plates. The connector secures the sphere between the first and second plates. The system may also include a stand, an end effector coupled to the stand by the spherical joint, and a mobility system that is capable of actuating the end effector. The mobility system includes two or more linking elements coupled to the end effector, and a motor coupled to the linking elements to actuate the end effector to track sunlight.

Abstract: A method for moving an end effector based on receipt of sunlight, the end effector divided into a first and second upper quadrant located above a Y-axis that corresponds to a solar azimuth and a first and second lower quadrant located below the Y-axis, the first upper and first lower quadrant located on a first side of an X-axis that corresponds to a solar angle and the second upper and second lower quadrant located on a second side of the X-axis, determining a vertical difference between an average of the illuminance received in first and second upper quadrants and an average of the illuminance received in first and second lower quadrants, determining a lateral difference between an average of the illuminance received in the first upper quadrant and the first lower quadrant and an average of the illuminance received in the second upper quadrant and the second lower quadrant, moving end effector along the X-axis in response to the vertical difference being greater than a vertical tolerance; and moving the end

Abstract: A robotic coupling joint system and method are discussed herein, which may be utilized with a daylighting system or photovoltaic system to track sunlight. The system may provide a spherical joint allowing axial motion about two or more axes of the spherical joint. The joint comprises a first plate with four or more sockets, a second plate, a connector, and one or more spheres positioned between the first and second plates. The connector secures the sphere between the first and second plates. The system may also include a stand, an end effector coupled to the stand by the spherical joint, and a mobility system that is capable of actuating the end effector. The mobility system includes two or more linking elements coupled to the end effector, and a motor coupled to the linking elements to actuate the end effector to track sunlight.

Abstract: An illumination device is described for desorbing molecules from inner walls of a processing chamber. In some examples, the device includes a chassis, a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered, a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber, and an electrical system to activate the LEDs within the processing chamber.

Abstract: An illumination device is described for desorbing molecules from inner walls of a processing chamber. In some examples, the device includes a chassis, a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered, a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber, and an electrical system to activate the LEDs within the processing chamber.