Abstract: An adjustable clip for securing a grazing-incident collector (GIC) shell to a spider having spokes is disclosed. The clip includes a base adapted to be secured to a spider spoke and having an upper surface. The clip includes a fork member having two prongs each with end pads at respective prong ends, and having a first hinge portion at an end opposite the prong ends. A hinge leaf is secured to the base upper surface and has a second hinge portion that operably engages the first hinge portion, thereby forming a hinge that allows for rotatable adjustment of the fork member relative to the base. Movement of the GIC shell when performing optical alignment is accommodated by the clip self-adjusting by its end pads moving over the GIC shell outer surface. When GIC shell alignment is achieved, the end pads are secured to the GIC shell outer surface, thereby turning the clip into a rigid support member that secures the GIC shell in place relative to the spider.

Abstract: A cooling system (10) for an extreme ultraviolet (EUV) grazing incidence collector (GIC) mirror assembly (240) having at least one shell (20) with a back surface (22) is disclosed. The cooling system has a plurality of spaced apart circularly configured cooling lines (30) arranged in parallel planes (PL) that are perpendicular to the shell central axis (AC) and that are in thermal contact with and that run around the back surface. Input and output secondary cooling-fluid manifolds (44, 46) are respectively fluidly connected to the plurality of cooling lines to flow a cooling fluid from the input secondary cooling-fluid manifold to the output cooling secondary fluid manifold over two semicircular paths for each cooling line. Separating the cooling fluid input and output locations reduces thermal gradients that can cause local surface deformations in the shell that can lead to degraded focusing performance.

Abstract: An adjustable clip for securing a grazing-incident collector (GIC) shell to a spider having spokes is disclosed. The clip includes a base adapted to be secured to a spider spoke and having an upper surface. The clip includes a fork member having two prongs each with end pads at respective prong ends, and having a first hinge portion at an end opposite the prong ends. A hinge leaf is secured to the base upper surface and has a second hinge portion that operably engages the first hinge portion, thereby forming a hinge that allows for rotatable adjustment of the fork member relative to the base. Movement of the GIC shell when performing optical alignment is accommodated by the clip self-adjusting by its end pads moving over the GIC shell outer surface. When GIC shell alignment is achieved, the end pads are secured to the GIC shell outer surface, thereby turning the clip into a rigid support member that secures the GIC shell in place relative to the spider.