Patents by Inventor Richard A. Bartley

Richard A. Bartley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Brush conditioner wing
    Patent number: 5894622
    Abstract: A brush conditioner for a semiconductor wafer cleaning tool including a pair if opposed, rotating flexible brushes. The conditioner is a wing-like structure having a leading edge and a trailing edge. The leading edge is forced against the rotating brushes flexing them to assist in removal of foreign material. The trailing edge tapers to a point and provides stability to the wing.
    Type: Grant
    Filed: December 31, 1997
    Date of Patent: April 20, 1999
    Assignee: International Business Machines Corporation
    Inventors: Paul A. Manfredi, Douglas P. Nadeau, Raymond G. Morris, Richard A. Bartley, Michael R. Amsden, deceased
  • Silicon wafer cleaning and polishing pads
    Patent number: 5778481
    Abstract: Disc shaped cleaning/polishing pads are disclosed for use on a cleaning/polishing apparatus wherein the surface of the cleaning/polishing pad comprises resilient members arranged in patterns which will facilitate the movement of fluids (deoinized water, chemical slurry, etc.) from the center region of the pad to the periphery of the pad. Arrangement of the resilient members on the pads may be spiral, swirl, concentric or any other suitable pattern which will direct fluids to the periphery of the pad upon rotation of the pad.
    Type: Grant
    Filed: July 26, 1996
    Date of Patent: July 14, 1998
    Assignee: International Business Machines Corporation
    Inventors: Michael R. Amsden, Richard A. Bartley, Cuc Huynh, Paul A. Manfredi, Douglas P. Nadeau