Patents by Inventor Richard A. Rameriz

Richard A. Rameriz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automatic impedance matching apparatus and method
    Patent number: 5621331
    Abstract: Methods for rapidly adjusting the impedance of a variable impedance apparatus to match the impedance of a source to the impedance of a load, where the load impedance is a nonlinear function of the power delivered to the load, are described. In addition, an automatic impedance matching apparatus for matching the impedance of a source to the impedance of a load and for maintaining a stable plasma are described. The apparatus includes a variable impedance apparatus, a plurality of electric field sensors, a photosensitive detector, a data processor, and a memory.
    Type: Grant
    Filed: July 10, 1995
    Date of Patent: April 15, 1997
    Assignee: Applied Science and Technology, Inc.
    Inventors: Donald K. Smith, Brian D. McVey, Richard A. Rameriz