Patents by Inventor Richard A. STICE

Richard A. STICE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to reduce particles during STI fill and reduce CMP scratches
    Patent number: 9721828
    Abstract: A method of filling STI trenches with dielectric with reduced particle formation. A method of depositing unbiased STI oxide on an integrated circuit during STI trench fill that reduces STI defects during STI CMP.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: August 1, 2017
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Andrew Brian Nelson, Richard A. Stice, Joe Tran
  • METHOD TO REDUCE PARTICLES DURING STI FILL AND REDUCE CMP SCRATCHES
    Publication number: 20150187635
    Abstract: A method of filling STI trenches with dielectric with reduced particle formation. A method of depositing unbiased STI oxide on an integrated circuit during STI trench fill that reduces STI defects during STI CMP.
    Type: Application
    Filed: December 3, 2014
    Publication date: July 2, 2015
    Inventors: Andrew Brian NELSON, Richard A. STICE, Joe TRAN