Abstract: An anode for batteries having a columnar nanostructured porous germanium for its active material. This nanostructured porous germanium can be produced with the novel etching method disclosed herein. Such anode can be easily mass-produced with the presented method that requires pre-existing, affordable and easy to integrate equipment. In some embodiments, the produced columnar porous germanium can be directly used as a monolithic anode after its etching nanostructuration for on-chip anodes for example, where the anisotropic nanostructured germanium acts as the active material and where the remaining bulk germanium layer act as the current collector. This can be easily implemented in lithium batteries. The cycle life of such anodes could be extended by a factor of 26 and 1.8 for high rate and high energy applications, respectively.

Abstract: An optocoupler, an optical interconnect and method of manufacture providing same are provided for coupling an optical signal between a high refractive index waveguide of an integrated circuit and a waveguide external to the integrated circuit. The optocoupler includes a thinned high refractive index waveguide having a thickness configured to exhibit an effective refractive index substantially matching a refractive index of the external waveguide.

Abstract: An optocoupler, an optical interconnect and method of manufacture providing same are provided for coupling an optical signal between a high refractive index waveguide of an integrated circuit and a waveguide external to the integrated circuit. The optocoupler includes a thinned high refractive index waveguide having a thickness configured to exhibit an effective refractive index substantially matching a refractive index of the external waveguide.

Abstract: An epitaxial deposition apparatus comprises a deposition chamber with at least one gas injector having a gas injection surface and a substrate support having a deposition surface; and at least one vacuum pump having a gas aperture in fluid communication with the deposition chamber and facing the gas injection surface of the at least one gas injector, the substrate support being inter-posed between the at least one gas injector and the gas aperture of the at least one vacuum pump. The invention also relates to an epitaxial deposition gas injector and a nozzle for an epitaxial deposition gas injector. Furthermore, the invention relates to a gas supply and handling system for an epitaxial deposition apparatus.