Patents by Inventor Richard B. Rice

Richard B. Rice has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conditioner for a polishing pad and method therefor
    Patent number: 5456627
    Abstract: An axially rotating circular polishing pad is conditioned by a rotating end effector that has an abrasion disc in contact with a polishing surface of the pad. The end effector moves along a radius of the polishing pad surface at a velocity that varies to compensate for locations on the polishing pad surface having linear velocities that are directly related to their respective radii. A desired contact force is maintained between the end effector and the polishing pad surface.
    Type: Grant
    Filed: December 20, 1993
    Date of Patent: October 10, 1995
    Assignee: Westech Systems, Inc.
    Inventors: Paul D. Jackson, Stephen C. Schultz, James E. Sanford, Glen Ong, Richard B. Rice, Parag S. Modi, John G. Baca