Patents by Inventor Richard B. Ward

Richard B. Ward has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5621813
    Abstract: A substrate alignment and exposure system is disclosed The alignment is performed by capturing an image of the substrate with a pattern recognition system, determining the offset from the alignment and moving the substrate relative to the reticle to be in alignment. A first optical alignment system which captures an image of a position of the substrate off of the primary axis of the exposure optics is used to perform pre-alignment. A second optical alignment system captures an image of the reticle and the substrate through the lens of the exposure optics. The pattern recognition system recognizes the alignment keys on the reticle, alignment targets on the substrate, and computes their positions and displacement from alignment. The relative alignment can be direct or inferred. Any angular and translational misalignment is calculated. The pattern recognition system then moves the substrate to be in alignment with the reticle.
    Type: Grant
    Filed: November 14, 1995
    Date of Patent: April 15, 1997
    Assignee: Ultratech Stepper, Inc.
    Inventors: Robert L. Brown, Hwan J. Jeong, David A. Markle, David S. Pan, Richard B. Ward, Mark S. Wanta
  • Patent number: 5606614
    Abstract: In personal identification systems which compare passwords in a verification computer to identify a user, successive passwords are generated, or retrieved from a stored list in the verification computer in response to each entry of a public username into the verification computer. A user device carried by the user retrieves the next successive password from a stored list in response to a command from the user and displays the password. The user then reads this password and offers it to the verification computer via a keyboard entry to be compared with the password already generated or retrieved in response to the username (the expected password).
    Type: Grant
    Filed: April 19, 1996
    Date of Patent: February 25, 1997
    Assignee: British Telecommunications public limited company
    Inventors: Patrick S. Brady, Michael J. Kenning, David A. Roberts, Robert E. V. Semos, Mark J. Stirland, Richard B. Ward