Patents by Inventor Richard Bayne Gregory

Richard Bayne Gregory has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for transfer of thin-film of silicon carbide via implantation and wafer bonding
    Patent number: 6355541
    Abstract: Systems and methods are described for transfer of a thin-film via implantation, wafer bonding, and separation. A method for transfer of a thin-film, includes: implanting a source crystal with ions along a crystallographic channel and at a temperature of at least approximately 200° C. to i) form a strained region and ii) define the thin-film; then bonding a surface of the thin-film to a target wafer; and then separating a) the target wafer and the thin-film from b) a remainder of the source crystal along the strained region. The systems and methods provide advantages because the electrical carriers in the crystal, and consequently the thin-film, are not deactivated and the quality of the transferred thin-film is improved.
    Type: Grant
    Filed: April 21, 1999
    Date of Patent: March 12, 2002
    Assignees: Lockheed Martin Energy Research Corporation, Motorola, Inc.
    Inventors: Orin Wayne Holland, Darrell Keith Thomas, Richard Bayne Gregory, Syd Robert Wilson, Thomas Allen Wetteroth