Patents by Inventor Richard Blank
Richard Blank has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240136161Abstract: A system comprises a pedestal and a controller. The pedestal is arranged below a showerhead in a processing chamber and includes at least three electrodes to clamp a substrate to the pedestal during processing. The controller is configured to measure a pedestal-to-showerhead gap and at least one of a magnitude and a direction of a relative tilt between the pedestal and the showerhead by sensing impedances between the at least three electrodes and the showerhead.Type: ApplicationFiled: March 11, 2022Publication date: April 25, 2024Inventors: Karl Frederick LEESER, Richard BLANK, Jacob L. HIESTER
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Patent number: 11908714Abstract: A transfer robot assembly arranged within an ATV transfer module includes a transfer robot that includes an end effector and one or more arm segments connected between the end effector and a transfer robot platform. A first robot alignment arm is connected to the transfer robot platform. A second robot alignment arm is connected to the first robot alignment arm and to a mounting chassis of the ATV transfer module. The transfer robot assembly is configured to actuate the first robot alignment arm and the second robot alignment arm to raise and lower the transfer robot to adjust a position of the transfer robot in a vertical direction and in a horizontal direction. The transfer robot is configured to fold into a folded configuration having a narrow profile occupying less than 50% of an overall depth of the ATV transfer module.Type: GrantFiled: November 7, 2022Date of Patent: February 20, 2024Assignee: Lam Research CorporationInventors: Richard H. Gould, Richard Blank
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Publication number: 20230395410Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: ApplicationFiled: August 11, 2023Publication date: December 7, 2023Inventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Patent number: 11742229Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: GrantFiled: December 16, 2021Date of Patent: August 29, 2023Assignee: Lam Research CorporationInventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Publication number: 20230062737Abstract: A transfer robot assembly arranged within an ATV transfer module includes a transfer robot that includes an end effector and one or more arm segments connected between the end effector and a transfer robot platform. A first robot alignment arm is connected to the transfer robot platform. A second robot alignment arm is connected to the first robot alignment arm and to a mounting chassis of the ATV transfer module. The transfer robot assembly is configured to actuate the first robot alignment arm and the second robot alignment arm to raise and lower the transfer robot to adjust a position of the transfer robot in a vertical direction and in a horizontal direction. The transfer robot is configured to fold into a folded configuration having a narrow profile occupying less than 50% of an overall depth of the ATV transfer module.Type: ApplicationFiled: November 7, 2022Publication date: March 2, 2023Inventors: Richard H. GOULD, Richard Blank
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Publication number: 20220411396Abstract: Disclosed herein, inter alia, are trioxolane compounds and methods of using the same for treatment and detection of diseases.Type: ApplicationFiled: February 25, 2022Publication date: December 29, 2022Inventors: Adam Robert Renslo, Brian Richard Blank, Ryan Keith Muir, Michael John Evans, Poulami Talukder
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Patent number: 11521869Abstract: An atmosphere-to-vacuum (ATV) transfer module for a substrate processing tool includes a first side configured to interface with at least one loading station, a transfer robot assembly arranged within the ATV transfer module, and a second side opposite the first side. The transfer robot assembly is configured to transfer substrates between the at least one loading station and at least one load lock arranged between the ATV transfer module and a vacuum transfer module (VTM). The second side is configured to interface with the at least one load lock. The transfer robot assembly is arranged adjacent to the second side, and the at least one load lock extends through the second side into an interior volume of the ATV transfer module.Type: GrantFiled: March 14, 2018Date of Patent: December 6, 2022Assignee: Lam Research CorporationInventors: Richard H. Gould, Richard Blank
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Publication number: 20220134568Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.Type: ApplicationFiled: February 27, 2020Publication date: May 5, 2022Inventors: Richard BLANK, Aravind ALWAN, Behnam BEHZIZ, Peter THAULAD, Mark E. EMERSON
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Publication number: 20220108902Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: ApplicationFiled: December 16, 2021Publication date: April 7, 2022Inventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Patent number: 11239100Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: GrantFiled: May 8, 2020Date of Patent: February 1, 2022Assignee: Lam Research CorporationInventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Publication number: 20210320029Abstract: A process module for a substrate processing tool includes a plurality of processing stations each configured to perform a process on a substrate and a mechanical indexer arranged within the process module. The mechanical indexer includes a plurality of end effectors including at least a first end effector, a second end effector, and a third end effector. Each of the plurality of end effectors extends in a radial direction from a central axis of the mechanical indexer and is configured to rotate about the central axis within the process module. The mechanical indexer is configured to position each of the plurality of end effectors at any one of the plurality of processing stations within the process module. The mechanical indexer is configured to position more than one of the plurality of end effectors at a same one of the plurality of processing stations at a same time.Type: ApplicationFiled: May 3, 2021Publication date: October 14, 2021Inventors: Michael NORDIN, Karl Frederick LEESER, Richard BLANK, Robert SCULAC, Damien Martin SLEVIN
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Patent number: 11072594Abstract: Disclosed herein, inter alia, are trioxolane compounds and methods of using the same for treatment and detection of diseases.Type: GrantFiled: June 27, 2018Date of Patent: July 27, 2021Assignee: The Regents of the University of CaliforniaInventors: Adam Robert Renslo, Brian Richard Blank, Ryan Keith Muir, Michael John Evans, Poulami Talukder
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Patent number: 11024531Abstract: A mechanical indexer for a substrate processing tool includes first and second arms each having first and second end effectors. The first arm is configured to rotate on a first spindle to selectively position the first end effector of the first arm at a plurality of processing stations of the substrate processing tool and selectively position the second end effector of the first arm at the plurality of processing stations of the substrate processing tool. The second arm is configured to rotate on a second spindle to selectively position the first end effector of the second arm at the plurality of processing stations of the substrate processing tool and selectively position the second end effector of the second arm at the plurality of processing stations of the substrate processing tool. The first arm is configured to rotate independently of the second arm.Type: GrantFiled: January 11, 2018Date of Patent: June 1, 2021Assignee: Lam Research CorporationInventors: Michael Nordin, Karl Leeser, Richard Blank, Robert Sculac
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Publication number: 20200273731Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: ApplicationFiled: May 8, 2020Publication date: August 27, 2020Inventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Patent number: 10651065Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: GrantFiled: June 5, 2018Date of Patent: May 12, 2020Assignee: Lam Research CorporationInventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Publication number: 20200140406Abstract: Disclosed herein, inter alia, are trioxolane compounds and methods of using the same for treatment and detection of diseases.Type: ApplicationFiled: June 27, 2018Publication date: May 7, 2020Inventors: Adam Robert Renslo, Brian Richard Blank, Ryan Keith Muir, Michael John Evans, Poulami Talukder
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Publication number: 20200083071Abstract: An atmosphere-to-vacuum (ATV) transfer module for a substrate processing tool includes a first side configured to interface with at least one loading station, a transfer robot assembly arranged within the ATV transfer module, and a second side opposite the first side. The transfer robot assembly is configured to transfer substrates between the at least one loading station and at least one load lock arranged between the ATV transfer module and a vacuum transfer module (VTM). The second side is configured to interface with the at least one load lock. The transfer robot assembly is arranged adjacent to the second side, and the at least one load lock extends through the second side into an interior volume of the ATV transfer module.Type: ApplicationFiled: March 14, 2018Publication date: March 12, 2020Inventors: Richard H. GOULD, Richard BLANK
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Publication number: 20190172738Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: ApplicationFiled: June 5, 2018Publication date: June 6, 2019Inventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Publication number: 20180211864Abstract: A mechanical indexer for a substrate processing tool includes first and second arms each having first and second end effectors. The first arm is configured to rotate on a first spindle to selectively position the first end effector of the first arm at a plurality of processing stations of the substrate processing tool and selectively position the second end effector of the first arm at the plurality of processing stations of the substrate processing tool. The second arm is configured to rotate on a second spindle to selectively position the first end effector of the second arm at the plurality of processing stations of the substrate processing tool and selectively position the second end effector of the second arm at the plurality of processing stations of the substrate processing tool. The first arm is configured to rotate independently of the second arm.Type: ApplicationFiled: January 11, 2018Publication date: July 26, 2018Inventors: Michael Nordin, Karl Leeser, Richard Blank, Robert Sculac
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Patent number: 9576833Abstract: A robot for a substrate processing system includes a first arm and a second arm each including a first arm portion connected to a base, a second arm portion connected to the first arm portion, and an end effector connected to the second arm portion. The first arm and the second arm are each configured to actuate between a fully retracted position and a plurality of extended positions. The end effector of the first arm is configured to support a first substrate and the end effector of the second arm is configured to support a second substrate. When the first arm and the second arm are in the respective fully retracted positions, the first substrate is spaced apart from and does not overlap the second substrate.Type: GrantFiled: October 7, 2015Date of Patent: February 21, 2017Assignee: LAM RESEARCH CORPORATIONInventors: Richard Blank, Matt McLellan