Abstract: A sputter coating apparatus displays set and alternative machine parameters, entered or calculated from entered or measured data, for selection by the operator. The apparatus performs a sputter coating process to produce sputter coated articles in accordance with the selected machine parameters. Process parameters familiar to the person creating the process, such as desired coating thickness and desired deposition rate, may be entered by the operator. Measured data such as actual coating thickness at a plurality of points on a previously processed wafer may be entered by an operator or automatically measured from a wafer. Alternative machine parameters such as target sputtering power may be entered by an operator or calculated from entered process parameters or measured data. The operator selects and initiates a process in accordance with the selections by entering commands.

Abstract: A 20 to 500 MHz directional coupler for use in a high power RF system uses a pair of transmission line sections electrically interconnected in series by their shield terminals. The primary signal is passed through one of the line sections, and the second section is connected to ground through a resistor. The forward voltage is thus the voltage between the shield of the first line section and ground across the second line section.

Abstract: RF signals may be split or combined across a wide band of frequencies with low insertion losses, large isolation between input ports, and low voltage standing wave ratio by means of coaxial transmission line sections interconnected in a bridge configuration. Even mode impedances between the cable shield and the common ground plane may be eliminated by placing ferrite sleeves on each line section. Impedance transformations introduced by the splitter/combiner are counteracted by a coaxial line impedance transformer.

Abstract: An antenna for operating over a broadband of frequencies includes an operating radiating elements for radiating radio frequency energy at a selected band of frequencies and a lower radiating element for providing a counter poise to the upper radiating element. An antenna coupler transforms the load impedance of the upper radiating elements and the lower radiating element to a nominal impedance, such as 50 ohms. The coupler element also electronically couples the lower radiating element to the upper radiating element.

Abstract: An acoustical sparker probe apparatus is described for generating a high energy acoustical pulse at a frequency between 600 hz and 10 khz in a borehole having a diameter between 50 mm and 100 mm. The apparatus includes an uphole electronic system having a low voltage AC power source which is directed through an electrical cable to a borehole probe that is moved along the length of the borehole. The borehole probe has a sparker section with electrodes for generating a high energy acoustical pulse when a high energy electrical spark discharge is created between the electrodes. The probe has a high voltage DC energy section with a voltage multiplying and electrical energy storage for receiving the low voltage AC from uphole and creating and storing over 100 joules of electrical energy at a voltage above 1000 volts within the probe. The probe has a triggering network for rapidly discharging the high voltage electrical energy across the electrodes at above 5000 amp for 10 .mu.