Patents by Inventor Richard Ciari

Richard Ciari has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning and drying method and apparatus
    Patent number: 6837944
    Abstract: A method of cleaning semiconductor wafers before the epitaxial deposition comprising (A) etching silicon wafers with HF; (B) rinsing the etched wafers with ozonated ultrapure water; (C) treating the rinsed wafers with dilute SC1; (D) rinsing the treated wafers; (E) treating the wafers with dilute HF; (F) rinsing the wafers with DI water; (G) drying the wafers with nitrogen and a trace amount of IPA; wherein steps (E) through (G) are conducted in a single dryer chamber and wafers are not removed from the chamber between steps. A system comprising a single tank adapted for cleaning, etching, rinsing, and drying the wafers has means to inject HF into a DI water stream.
    Type: Grant
    Filed: March 4, 2002
    Date of Patent: January 4, 2005
    Assignee: Akrion LLC
    Inventors: Ismail Kashkoush, Gim-Syang Chen, Richard Ciari, Richard E. Novak
  • Cleaning and drying method and apparatus
    Publication number: 20030019507
    Abstract: A method of cleaning semiconductor wafers before the epitaxial deposition comprising (A) etching silicon wafers with HF; (B) rinsing the etched wafers with ozonated ultrapure water; (C) treating the rinsed wafers with dilute SC1; (D) rinsing the treated wafers; (E) treating the wafers with dilute HF; (F) rinsing the wafers with DI water; (G) drying the wafers with nitrogen and a trace amount of IPA; wherein steps (E) through (G) are conducted in a single dryer chamber and wafers are not removed from the chamber between steps. A system comprising a single tank adapted for cleaning, etching, rinsing, and drying the wafers has means to inject HF into a DI water stream.
    Type: Application
    Filed: March 4, 2002
    Publication date: January 30, 2003
    Inventors: Ismail Kashkoush, Gim-Syang Chen, Richard Ciari, Richard E. Novak