Patents by Inventor Richard Dalton Peters

Richard Dalton Peters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11460778
    Abstract: Improved stripper solutions for removing photoresists from substrates are provided that exhibit improved compatibility with copper, leadfree solder, and epoxy-based molding compounds. The stripper solutions comprise a primary solvent, a secondary glycol ether solvent, potassium hydroxide, and an amine. The solutions also exhibit reduced potassium carbonate crystal formation compared to conventional formulations containing potassium hydroxide, and extended bath life compared to formulations containing tetramethylammonium hydroxide.
    Type: Grant
    Filed: March 26, 2019
    Date of Patent: October 4, 2022
    Assignee: VERSUM MATERIALS US, LLC
    Inventors: Richard Dalton Peters, Yuanmei Cao
  • Patent number: 11353794
    Abstract: Improved stripper solutions for removing photoresists from substrates are provided that typically have freezing points below about 0° C. and high loading capacities. The stripper solutions comprise dimethyl sulfoxide, quaternary ammonium hydroxide, and an alkanolamine having at least two carbon atoms, at least one amino substituent and at least one hydroxyl substituent, the amino and hydroxyl substituents attached to two different carbon atoms. Some formulations can additionally contain a secondary solvent. The formulations do not contain tetramethylammonium hydroxide. Methods for use of the stripping solutions are additionally provided.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: June 7, 2022
    Assignee: VERSUM MATERIALS US, LLC
    Inventors: Richard Dalton Peters, Michael T. Phenis
  • Publication number: 20190317409
    Abstract: Improved stripper solutions for removing photoresists from substrates are provided that exhibit improved compatibility with copper, leadfree solder, and epoxy-based molding compounds. The stripper solutions comprise a primary solvent, a secondary glycol ether solvent, potassium hydroxide, and an amine. The solutions also exhibit reduced potassium carbonate crystal formation compared to conventional formulations containing potassium hydroxide, and extended bath life compared to formulations containing tetramethylammonium hydroxide.
    Type: Application
    Filed: March 26, 2019
    Publication date: October 17, 2019
    Applicant: Versum Materials US, LLC
    Inventors: Richard Dalton Peters, Yuanmei Cao
  • Publication number: 20190196337
    Abstract: Improved stripper solutions for removing photoresists from substrates are provided that typically have freezing points below about 0° C. and high loading capacities. The stripper solutions comprise dimethyl sulfoxide, quaternary ammonium hydroxide, and an alkanolamine having at least two carbon atoms, at least one amino substituent and at least one hydroxyl substituent, the amino and hydroxyl substituents attached to two different carbon atoms. Some formulations can additionally contain a secondary solvent. The formulations do not contain tetramethylammonium hydroxide. Methods for use of the stripping solutions are additionally provided.
    Type: Application
    Filed: December 17, 2018
    Publication date: June 27, 2019
    Applicant: Versum Materials US, LLC
    Inventors: Richard Dalton Peters, Michael T. Phenis
  • Patent number: 10073352
    Abstract: The disclosure is directed solutions and processes to remove substances from substrates. In some cases, the substances can include photoresist on semiconductor wafers. The solution can include a quaternary ammonium hydroxide an amine, and optionally a corrosion inhibitor and/or a sugar alcohol. One or more sides of the substrate can be contacted with the solution to remove one or more substances from the substrate.
    Type: Grant
    Filed: April 12, 2016
    Date of Patent: September 11, 2018
    Assignee: VERSUM MATERIALS US, LLC
    Inventors: Richard Dalton Peters, Travis W. Acra, Kimberly Dona Pollard
  • Publication number: 20170293228
    Abstract: The disclosure is directed solutions and processes to remove substances from substrates. In some cases, the substances can include photoresist on semiconductor wafers. The solution can include a quaternary ammonium hydroxide an amine, and optionally a corrosion inhibitor and/or a sugar alcohol. One or more sides of the substrate can be contacted with the solution to remove one or more substances from the substrate.
    Type: Application
    Filed: April 12, 2016
    Publication date: October 12, 2017
    Applicant: Dynaloy, LLC
    Inventors: Richard Dalton Peters, Travis W. Acra, Kimberly Dona Pollard
  • Patent number: 9650594
    Abstract: The disclosure is directed solutions and processes to remove substances from substrates. Optionally, the substances can include photoresist on semiconductor wafers. The solution may include a quaternary ammonium hydroxide, a first amine, a second amine, and a third amine with the total amount of amine being no greater than about 95% by weight of a total weight of the solution. Additionally, a solution may include at least one amine, a quaternary ammonium hydroxide, and water and be free of a polar solvent other than water with the solution having a dynamic viscosity that is no greater than about 60 centipoise.
    Type: Grant
    Filed: January 22, 2015
    Date of Patent: May 16, 2017
    Assignee: Dynaloy, LLC
    Inventors: Travis Acra, Richard Dalton Peters, Kimberly Dona Pollard, Donald James Pfettscher
  • Publication number: 20160215240
    Abstract: The disclosure is directed solutions and processes to remove substances from substrates. Optionally, the substances can include photoresist on semiconductor wafers. The solution may include a quaternary ammonium hydroxide, a first amine, a second amine, and a third amine with the total amount of amine being no greater than about 95% by weight of a total weight of the solution. Additionally, a solution may include at least one amine, a quaternary ammonium hydroxide, and water and be free of a polar solvent other than water with the solution having a dynamic viscosity that is no greater than about 60 centipoise.
    Type: Application
    Filed: January 22, 2015
    Publication date: July 28, 2016
    Applicant: Dynaloy, LLC
    Inventors: Travis Acra, Richard Dalton Peters, Kimberly Dona Pollard, Donald James Pfettscher
  • Patent number: 9291910
    Abstract: The disclosure is directed solutions and processes to remove substances from substrates. In some cases, the substances can include photoresist on semiconductor wafers. The solution can include hydrogen peroxide in an amount that is no greater than 15% by weight of the total weight of the solution. The solution can also include a quaternary ammonium hydroxide and water. Further, the solution can include an amine, a co-solvent, or both. One or more sides of the substrate can be contacted with the solution to remove one or more substances from the solution.
    Type: Grant
    Filed: September 27, 2013
    Date of Patent: March 22, 2016
    Assignee: Dynaloy, LLC
    Inventors: Richard Dalton Peters, Travis W. Acra, Yuanmei Cao, Nichelle Maria Gilbert, Michael Tod Phenis, Kimberly Dona Pollard, Joshua Cummins, Meng Guo, Donald James Pfettscher
  • Patent number: 9158202
    Abstract: Compositions are described that are useful for removing organic and organometallic substances from substrates, for example, photoresist wafers. Processes are presented that apply a minimum volume of a composition as a coating to the inorganic substrate whereby sufficient heat is added and the organic or organometallic substances are completely removed by rinsing. The compositions and processes may be suitable for removing and, in some instances, completely dissolving photoresists of the positive and negative varieties, and specifically negative dry film photoresist from electronic devices.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: October 13, 2015
    Assignee: Dynaloy, LLC
    Inventors: Richard Dalton Peters, Travis Acra, Yuanmei Cao, Spencer Erich Hochstetler, Michael Tod Phenis, Kimberly Dona Pollard
  • Publication number: 20150270155
    Abstract: The present invention relates to an accommodating device for accommodation and mounting of a wafer for application of a fluid to a top of the wafer with the following features: a revolving ring section with: d) a revolving upper edge, e) a revolving recess and f) a circumferential wall running from the upper edge to the recess, a contact plane (A) arranged within the ring section for the accommodation of the wafer on a contact surface of the wafer, wherein the ring section by means of accommodation of the wafer forms with said wafer an accommodating space for accommodation of the fluid.
    Type: Application
    Filed: November 21, 2012
    Publication date: September 24, 2015
    Applicant: EV GROUP INC.
    Inventors: Spencer Hochstetler, Richard Dalton Peters, Travis Acra
  • Publication number: 20150219996
    Abstract: Stripping compositions are described that are useful for removing organic substances from substrates, for example, electronic device substrates such as microelectronic wafers or flat panel displays. The stripping compositions may be suitable for removing photoresists, including acrylic-based negative dry film photoresist, from electronic devices. In one embodiment, the stripping compositions can include a polar protic solvent, an amine or alkanoamine, and a quaternary ammonium hydroxide. In one embodiment the stripping compositions can include a polar protic solvent and at least two alkanoamines. The stripping compositions may be free of polar aprotic solvents.
    Type: Application
    Filed: February 6, 2014
    Publication date: August 6, 2015
    Applicant: Dynaloy, LLC
    Inventors: Richard Dalton Peters, Travis Acra, Yuanmei Cao, Nichelle Maria Gilbert, Michael Tod Phenis, Kimberly Dona Pollard, Joshua Cummins, Meng Guo, Donald James Pfettscher
  • Patent number: 9062200
    Abstract: Polymer blends suitable for packaging are disclosed that include one or more impact modifiers; and one or more polyethylene terephthalate homopolymers or copolymers obtained by a melt phase polymerization using a catalyst system comprising aluminum atoms in an amount, for example, from about 3 ppm to about 60 ppm and one or more alkaline earth metal atoms, alkali metal atoms, or alkali compound residues in an amount, for example, from about 1 ppm to about 25 ppm, in each case based on the weight of the one or more polyethylene terephthalate homopolymers or copolymers The polymer blends disclosed exhibit improved low temperature toughness compared with blends made using polymers prepared with conventional catalyst systems.
    Type: Grant
    Filed: August 14, 2014
    Date of Patent: June 23, 2015
    Assignee: GRUPO PETROTEMEX, S.A. DE C.V.
    Inventors: Frederick Leslie Colhoun, Mark Edward Stewart, Stephen Weinhold, Richard Dalton Peters, Roger Lee Martin
  • Patent number: 9029268
    Abstract: Processes are described to etch metals. In an embodiment, a process may include contacting a substrate with a stripping solution to remove photoresist from the substrate to produce a stripped substrate. The stripped substrate may include a plurality of solder pillars and a plurality of metal-containing field regions disposed around the plurality of solder pillars. In an illustrative embodiment, the plurality field regions may include copper. Additionally, the process may include rinsing the stripped substrate to produce a rinsed substrate. The rinsed substrate may be substantially free of a Sn layer or a Sn oxide layer. Further, the process may include contacting the rinsed substrate with an etch solution that is capable of removing an amount of one or more metals from the plurality of field regions.
    Type: Grant
    Filed: November 21, 2012
    Date of Patent: May 12, 2015
    Assignee: Dynaloy, LLC
    Inventors: Richard Dalton Peters, Travis Acra, Spencer Erich Hochstetler, Kimberly Dona Pollard
  • Publication number: 20150094249
    Abstract: The disclosure is directed solutions and processes to remove substances from substrates. In some cases, the substances can include photoresist on semiconductor wafers. The solution can include hydrogen peroxide in an amount that is no greater than 15% by weight of the total weight of the solution. The solution can also include a quaternary ammonium hydroxide and water. Further, the solution can include an amine, a co-solvent, or both. One or more sides of the substrate can be contacted with the solution to remove one or more substances from the solution.
    Type: Application
    Filed: September 27, 2013
    Publication date: April 2, 2015
    Applicant: Dynaloy, LLC
    Inventors: Richard Dalton Peters, Travis W. Acra, Yuanmei Cao, Nichelle Maria Gilbert, Michael Tod Phenis, Kimberly Dona Pollard, Joshua Cummins, Meng Guo, Donald James Pfettscher
  • Patent number: 8916338
    Abstract: Processes associated apparatus and compositions useful for removing organic substances from substrates, for example, electronic device substrates such as microelectronic wafers or flat panel displays, are provided. Processes are presented that apply a minimum volume of a composition as a coating to the inorganic substrate whereby sufficient heat is added and the organic substances are completely removed by rinsing. The compositions and processes may be suitable for removing and, in some instances, completely dissolving photoresists of the positive and negative varieties as well as thermoset polymers from electronic devices.
    Type: Grant
    Filed: November 19, 2013
    Date of Patent: December 23, 2014
    Assignee: Eastman Chemical Company
    Inventors: Michael Wayne Quillen, Dale Edward O'Dell, Zachary Philip Lee, John Cleaon Moore, Edward Enns McEntire, Spencer Erich Hochstetler, Richard Dalton Peters, Rodney Scott Armentrout, Darryl W. Muck
  • Publication number: 20140357797
    Abstract: Polymer blends suitable for packaging are disclosed that include one or more impact modifiers; and one or more polyethylene terephthalate homopolymers or copolymers obtained by a melt phase polymerization using a catalyst system comprising aluminum atoms in an amount, for example, from about 3 ppm to about 60 ppm and one or more alkaline earth metal atoms, alkali metal atoms, or alkali compound residues in an amount, for example, from about 1 ppm to about 25 ppm, in each case based on the weight of the one or more polyethylene terephthalate homopolymers or copolymers The polymer blends disclosed exhibit improved low temperature toughness compared with blends made using polymers prepared with conventional catalyst systems.
    Type: Application
    Filed: August 14, 2014
    Publication date: December 4, 2014
    Inventors: Frederick Leslie CALHOUN, Mark Edward STEWART, Stephen WEINHOLD, Richard Dalton PETERS, Roger LEE MARTIN
  • Patent number: 8859681
    Abstract: Polymer blends suitable for packaging are disclosed that include one or more impact modifiers; and one or more polyethylene terephthalate homopolymers or copolymers obtained by a melt phase polymerization using a catalyst system comprising aluminum atoms in an amount, for example, from about 3 ppm to about 60 ppm and one or more alkaline earth metal atoms, alkali metal atoms, or alkali compound residues in an amount, for example, from about 1 ppm to about 25 ppm, in each case based on the weight of the one or more polyethylene terephthalate homopolymers or copolymers The polymer blends disclosed exhibit improved low temperature toughness compared with blends made using polymers prepared with conventional catalyst systems.
    Type: Grant
    Filed: August 31, 2011
    Date of Patent: October 14, 2014
    Assignee: Grupo Petrotemex, S.A. de C.V.
    Inventors: Frederick Leslie Colhoun, Mark Edward Stewart, Stephen Weinhold, Richard Dalton Peters, Roger Lee Martin
  • Publication number: 20140141622
    Abstract: Processes are described to etch metals. In an embodiment, a process may include contacting a substrate with a stripping solution to remove photoresist from the substrate to produce a stripped substrate. The stripped substrate may include a plurality of solder pillars and a plurality of metal-containing field regions disposed around the plurality of solder pillars. In an illustrative embodiment, the plurality field regions may include copper. Additionally, the process may include rinsing the stripped substrate to produce a rinsed substrate. The rinsed substrate may be substantially free of a Sn layer or a Sn oxide layer. Further, the process may include contacting the rinsed substrate with an etch solution that is capable of removing an amount of one or more metals from the plurality of field regions.
    Type: Application
    Filed: November 21, 2012
    Publication date: May 22, 2014
    Applicant: DYNALOY, LLC
    Inventors: Richard Dalton Peters, Travis Acra, Spencer Erich Hochstetler, Kimberly Dona Pollard
  • Publication number: 20140137899
    Abstract: Processes are described to remove substances from substrates. In an embodiment, a process may include providing a substrate including a first side and a second side with a substance being disposed on at least a portion of the first side of the substrate. The process may also include contacting the substrate with a solution such that the first side of the substrate is coated with the solution, at least a portion of the second side is free of the solution and at least a portion of the substance is released from the first side of the substrate. Additionally, the process may include rinsing the substrate to remove at least a portion of the substance released from the first side of the substrate.
    Type: Application
    Filed: March 15, 2013
    Publication date: May 22, 2014
    Applicant: DYNALOY, LLC
    Inventors: Richard Dalton Peters, Travis Acra, Spencer Erich Hochstetler