Abstract: A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.

Abstract: A micro-scale apparatus for supporting a tool for hard turning comprises a base, a pivot coupled to the base, an actuator coupled to the base, and at least one member coupled to the actuator at one end and rotatably coupled to the pivot at another end. A tool mount is disposed on the at least one member. The at least one member defines a first lever arm between the pivot and the tool mount, and a second lever arm between the pivot and the actuator. The first lever arm has a length that is less than a length of the second lever arm. The actuator moves the tool mount along an arc.

Abstract: A micro-scale apparatus for supporting a tool for hard turning comprises a base, a pivot coupled to the base, an actuator coupled to the base, and at least one member coupled to the actuator at one end and rotatably coupled to the pivot at another end. A tool mount is disposed on the at least one member. The at least one member defines a first lever arm between the pivot and the tool mount, and a second lever arm between the pivot and the actuator. The first lever arm has a length that is less than a length of the second lever arm. The actuator moves the tool mount along an arc.

Abstract: A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.

Abstract: A three-axis micro- or meso-scale machining apparatus. Embodiments of the apparatus include a spindle having a tool for machining a workpiece, a z-axis movement platform for supporting the spindle and translating the spindle along a z-axis, a mount for supporting the workpiece, and a suspended x-y axes movement platform for supporting the mount and translating the mount along both x- and y-axes.