Patents by Inventor Richard E. Pingree

Richard E. Pingree has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA APPARATUS, GAS DISTRIBUTION ASSEMBLY FOR A PLASMA APPARATUS AND PROCESSES THEREWITH
    Publication number: 20040238123
    Abstract: A plasma apparatus, various components of the plasma apparatus, and an oxygen free and nitrogen free processes for effectively removing photoresist material and post etch residues from a substrate with a carbon and/or hydrogen containing low k dielectric layer(s).
    Type: Application
    Filed: May 22, 2003
    Publication date: December 2, 2004
    Applicant: AXCELIS TECHNOLOGIES, INC.
    Inventors: Alan Frederick Becknell, Thomas James Buckley, David Ferris, Richard E. Pingree, Palanikumaran Sakthivel, Aseem Kumar Srivastava, Carlo Waldfried
  • Plasma discharge device with dynamic tuning by a movable microwave trap
    Patent number: 6057645
    Abstract: A plasma discharge device and method for removing material from a substrate having dynamic tuning, which permits operation with a variety of process gasses over a range of operating conditions. A longitudinally extending microwave cavity is defined at the ends by microwave traps, the positions of which are longitudinally adjustable to provide dynamic tuning. An adjustable antenna is provided, and operation utilizes the TM.sub.012 mode.
    Type: Grant
    Filed: December 31, 1997
    Date of Patent: May 2, 2000
    Assignee: Eaton Corporation
    Inventors: Aseem K. Srivastava, Richard E. Pingree, Victor Pellicier