Abstract: A programmable substrate support including a first substrate support that mates with a second substrate support to enable automatic switching between different types of substrates. The first substrate support is configured to support a first type of substrate and to mount to a substrate positioning system to enable handling of substrates of the first type. The second substrate support is configured to support a second type of substrate, and is further configured to mate with the first substrate support to form a mated configuration. The mated configuration enables the substrate positioning system to handle substrates of the second type. In a semiconductor wafer processing embodiment, the first substrate support is an end effector capable of handling wafers of a first size, such as 200 millimeter (mm) wafers, and the second substrate support is another end effector capable of handling wafers of a second size, such as 300 mm wafers. Of course, any size and type of substrate is contemplated.

Abstract: A modular, transportable housing for storing substrates, such as semi-conductor wafers and masks, and for maintaining such substrates in a substantially clean environment. Substrates are supported within the housing by a plurality of combs which maintain the substrates in spaced relationship relative to each other. Access to the interior of the housing is permitted by a pivotal door assembly. A docking unit permits interface of the housing with a clean environment. Control circuitry provided in the docking unit detects the presence of a housing and loads/unloads the housing as directed by a host computer through a communication link. A memory device is preferably mounted to the housing for storing history and other information about the substrates within the housing. The host computer directs the control circuitry to retrieve the substrate information from the memory and relay the information to the host computer. During or after processing of the substrates, the host computer updates the memory as desired.

Abstract: A modular, transportable for storing substrates, such as semi-conductor wafers and masks, and for maintaining such substrates in a substantially clean environment. Substrates are supported within the housing by a plurality of combs which maintain the substrates in spaced relationship relative to each other. Access to the interior of the housing is permitted by a pivotal door assembly. A docking unit permits interface of the housing with a clean environment. Control circuitry provided in the docking unit detects the presence of a housing and loads/unloads the housing as directed by a host computer through a communication link. A memory device is preferably mounted to the housing for storing history and other information about the substrates within the housing. The host computer directs the control circuitry to retrieve the substrate information from the memory and relay the information to the host computer. During or after processing of the substrates, the host computer updates the memory as desired.

Abstract: A stage assembly for a substrate processing system including a cassette support assembly for receiving and supporting a cassette and an actuation and support assembly for supporting and moving the cassette and cassette support assembly between a loading position and a processing position. The processing position provides convenient and efficient access by a central processing system, and the loading position preferably places each cassette closer to, and aligned with, a front panel of the processing system for convenient access by an operator. The actuator and support assembly preferably includes a frame assembly and a rotating plate pivotally mounted to the frame assembly, where the cassette support assembly is mounted to the rotating plate for pivoting relative to the frame assembly. An actuator assembly mounted to the frame assembly flits the cassette support assembly between the loading and processing positions. A shaft assembly pivotally mounts the cassette support assembly to the rotating plate.

Abstract: A nesting passenger vehicle designed to improve access to subways and commuter trains by virtue of its reduced parking area requirements. A short cabin and a V shaped frame permit the vehicle to nest or horizontally stack into other vehicles of the same shape in a manner that requires a small amount of parking space per vehicle. The present invention provides a significant parking density advantage compared to conventional, privately owned automobiles.

Abstract: Sheet item stacking apparatus wherein an eccentric drive oscillating articulated arm carries a friction wheel at one end, and wherein an angularly disposed cross link pivoted at one end to the arm and at the opposite end to a fixed support causes the oscillating arm to move both forwardly and rearwardly as well as from side to side effective to edge align incoming sheet items within an operably associated item hopper from which the items are "front" removable.

Abstract: A pivotal feed head for feeding non-rigid paper sheets individually from a feed hopper to a photo-optical utilization station at high speed without interruption, overlap or collision between sheets including oppositely disposed members for applying a normal force between an enlarged resilient tired feed wheel adapted for unidirectional rotation and a conjointly movable, engageable retard roller. The feed head is mounted for pivotal movement about an outboard drive member. A frictional brake for the retard roller is adjustable to provide a preset load at the nip between the feed wheel and the retard roller while a solenoid-actuated one-way clutch operably engages the feed wheel mounting shaft for incremental signal controlled paper feed. A vertical, signal-controlled latching member locks the feed head in a vertical pivoted position at the end of the vertical upward movement of the paper stack platform as the paper is fed into the nip between the feed wheel and the retard roller.

Abstract: Modular automatic paper handling apparatus wherein a vertically movable paper item tray is incrementally elevatable into a paper feeding position adjacent a feeding device. A cable drive including an electromagnetic impulse clutch and solenoid escapement provide control for elevating the item tray. A pivotally movable reload tray is adapted to be positioned over the main item tray such that finger-like projections integral therewith are interfitted with upstanding projections on the main item tray enabling the main item tray to be raised into a position to automatically unload paper from the reload tray after which the reload tray is automatically snapped out of the way of the main item tray. A cable counter weight permits the main tray to retract downwardly to feeding position without overrunning or bouncing.

Abstract: Wherein a plurality of ink jet nozzles are carried on a rotatable disklike member so that ink is ejected in a stream of droplets radially from each nozzle. Ink droplets are charged in a binary manner (i.e. charged or not charged) by a fixed array of charging members which are electrically switched so as to track a specific jet. Fixed deflection members delete charged drops from the ink droplet stream leaving neutral droplets unaffected. Print receiving material is wrapped with a slight skew around a stationary cylindrical shell and moved along a slight helical path on the cylindrical shell's surface. The shell encloses and surrounds the rotating disklike member, the fixed charging members, the fixed deflecting members and a suitably disposed fixed ink catcher. The neutral droplets of ink are adapted to pass through a bank gap in the cylinder such that the circular ink jet droplet scan effectively becomes a helical scan on the moving paper so as to produce line by line printing.

Abstract: Electrostatic and magnetic transfer apparatus for conducting and magnetically attracting electronically conductive toner from the surface of a dielectric drum to a secondary substrate such as plain paper wherein a fixed permanent magnet disposed within a hollow cylindrical roller located at the image transfer point within a portion of a continuous loop of semi-conductive material supplies additional attractive force between the toner and the substrate exclusively at the image transfer point which in combination with the electrostatic transfer force applied to the imaged dielectric surface of the drum by means of a voltage potential applied to the hollow cylindrical roller, produces a dense, well defined pattern of intelligence replicating what was originally applied to the dielectric surface.