Abstract: The carrier-envelope phase in a train of optical pulses is varied utilizing the dispersive properties of lossless plates while the total dispersion in transmission is maintained practically constant. The plates include sloped surfaces and are mounted for displacement such that the ratio of the thicknesses of the two plates through which the optical pulses will pass can be varied by displacing the plates so as to shift the carrier-envelope phase in the optical pulses. In one embodiment, the plates include a barium fluoride wedge and a fumed silica wedge, wherein the wedges are bond together to form a composite structure with thicker and thinner portions of the wedges inversely matched.

Abstract: The carrier-envelope phase in a train of optical pulses is varied utilizing the dispersive properties of lossless plates while the total dispersion in transmission is maintained practically constant. The plates include sloped surfaces and are mounted for displacement such that the ratio of the thicknesses of the two plates through which the optical pulses will pass can be varied by displacing the plates so as to shift the carrier-envelope phase in the optical pulses. In one embodiment, the plates include a barium fluoride wedge and a fumed silica wedge, wherein the wedges are bond together to form a composite structure with thicker and thinner portions of the wedges inversely matched.

Abstract: An optical measurement apparatus (50) for a projection exposure system (10) for microlithography includes an optical sensor (52) that measures a given property of exposure radiation (16) within the projection exposure system (10) and a data interface (66; 166) that transmits at least one value for the measured property in the form of measurement data (60) to a data receiver (72). The data receiver (72) is separated from the measurement apparatus (50) at least during the measuring operation, and is disposed outside of the measurement apparatus (50). The optical measurement apparatus has the outer form of a reticle.

Abstract: A laser system for generating self-starting few cycle laser pulses or widely tunable laser pulses is provided. The laser system includes a modelocked pump source that provides a pulsed pump signal. A gain medium receives the pulsed pump signal. A resonator structure includes the gain medium and a plurality of mirrors. The resonator structure defines a laser operated in a CW-modelocked regime generating few-cycle laser pulses having a duration less then 30 fs.

Abstract: The phase spectrum of an ultrashort pulse is measured based on two-dimensional spectral shearing interferometry with zero delay. The measurement is performed utilizing an optical source pulse from which is extracted a short pulse and from which a chirped component is generated. The chirped component is split into first and second chirped pulses. The first and second pulses are then mixed with the short pulse in a nonlinear medium to produce up-converted and spectrally sheared copies of the first and second chirped pulses, which are measured in a spectrometer. A plurality of path lengths for the first second chirped pulses is provided to shift the relative phases of the first and second chirped pulses for additional measurements. The apparatus and methods are uniquely suited for characterizing single-cycle pulses.

Abstract: The carrier-envelope phase in a train of optical pulses is varied utilizing the dispersive properties of lossless plates while the total dispersion in transmission is maintained practically constant. The plates include sloped surfaces and are mounted for displacement such that the ratio of the thicknesses of the two plates through which the optical pulses will pass can be varied by displacing the plates so as to shift the carrier-envelope phase in the optical pulses. In one embodiment, the plates include a barium fluoride wedge and a fumed silica wedge, wherein the wedges are bond together to form a composite structure with thicker and thinner portions of the wedges inversely matched.

Abstract: The phase spectrum of an ultrashort pulse is measured based on two-dimensional spectral shearing interferometry with zero delay. The measurement is performed utilizing an optical source pulse from which is extracted a short pulse and from which a chirped component is generated. The chirped component is split into first and second chirped pulses. The first and second pulses are then mixed with the short pulse in a nonlinear medium to produce up-converted and spectrally sheared copies of the first and second chirped pulses, which are measured in a spectrometer. A plurality of path lengths for the first second chirped pulses is provide to generate delays and shift the relative positions of the first and second chirped pulses for additional measurements. The apparatus and methods are uniquely suited for characterizing single-cycle pulses.

Abstract: A laser system for generating self-starting few cycle laser pulses or widely tunable laser pulses is provided. The laser system includes a modelocked pump source that provides a pulsed pump signal. A gain medium receives the pulsed pump signal. A resonator structure includes the gain medium and a plurality of mirrors. The resonator structure defines a laser operated in a CW-modelocked regime generating few-cycle laser pulses having a duration less then 30 fs.