Patents by Inventor Richard FINDENIG

Richard FINDENIG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slit nozzle
    Patent number: 9597703
    Abstract: A slit nozzle for dispensing liquid onto a surface of a wafer, comprises a nozzle body having a discharge opening whose length is from 10-100 mm and whose width is from 0.5-5 mm. The nozzle body has a dispensing chamber positioned upstream of the discharge opening and extending to the discharge opening, and a liquid distribution chamber positioned upstream of the dispensing chamber. The dispensing chamber and the liquid distribution chamber are in fluid communication with one another and are separated by a reduction section of the nozzle body whose cross-sectional area is at least 20% less than a cross-sectional area of each of the discharge opening and the liquid distribution chamber.
    Type: Grant
    Filed: February 18, 2015
    Date of Patent: March 21, 2017
    Assignee: LAM RESEARCH AG
    Inventors: Stefan Detterbeck, Thomas Passegger, Bhaskar Bandarapu, Richard Findenig
  • SLIT NOZZLE
    Publication number: 20160236227
    Abstract: A slit nozzle for dispensing liquid onto a surface of a wafer, comprises a nozzle body having a discharge opening whose length is from 10-100 mm and whose width is from 0.5-5 mm. The nozzle body has a dispensing chamber positioned upstream of the discharge opening and extending to the discharge opening, and a liquid distribution chamber positioned upstream of the dispensing chamber. The dispensing chamber and the liquid distribution chamber are in fluid communication with one another and are separated by a reduction section of the nozzle body whose cross-sectional area is at least 20% less than a cross-sectional area of each of the discharge opening and the liquid distribution chamber.
    Type: Application
    Filed: February 18, 2015
    Publication date: August 18, 2016
    Inventors: Stefan DETTERBECK, Thomas PASSEGGER, Bhaskar BANDARAPU, Richard FINDENIG