Patents by Inventor Richard G. Forestal

Richard G. Forestal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon integrated angular rate sensor
    Patent number: 7908922
    Abstract: A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
    Type: Grant
    Filed: January 24, 2008
    Date of Patent: March 22, 2011
    Assignee: Delphi Technologies, Inc.
    Inventors: Seyed R. Zarabadi, John C. Christenson, Dan W. Chilcott, Richard G. Forestal, Jack D. Johnson
  • Method for manufacturing a sensor device
    Patent number: 7645627
    Abstract: A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
    Type: Grant
    Filed: January 24, 2008
    Date of Patent: January 12, 2010
    Assignee: Delphi Technologies, Inc.
    Inventors: John C. Christenson, Dan W. Chilcott, Richard G. Forestal, Jack L. Glenn, Seyed R. Zarabadi
  • Silicon integrated angular rate sensor
    Publication number: 20090188318
    Abstract: A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
    Type: Application
    Filed: January 24, 2008
    Publication date: July 30, 2009
    Inventors: Seyed R. Zarabadi, John C. Christenson, Dan W. Chilcott, Richard G. Forestal, Jack D. Johnson
  • Method for manufacturing a sensor device
    Publication number: 20090191660
    Abstract: A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
    Type: Application
    Filed: January 24, 2008
    Publication date: July 30, 2009
    Inventors: John C. Christenson, Dan W. Chilcott, Richard G. Forestal, Jack L. Glenn, Seyed R. Zarabadi