Abstract: The preferred embodiment of the invention measures the temperature increase of a light-transmitting optical component to determine the optical absorption of the optical component. Accurately determining the optical absorption of light-transmitting optical components advantageously allows for the accurate and efficient selection of light-transmitting optical components for use in an optical system. In one embodiment, an optical absorption tester holds multiple optical components and, for each optical component, the tester includes a temperature sensor placed in contact with the optical component and a reference temperature sensor placed in the vicinity of the optical component.

Abstract: An excimer laser chamber capable of arc-free operation at repetitive pulse rates of 1 kHz or greater is provided. The chamber balances the electrode design criteria required to produce a well-defined discharge channel with the flow design criteria required to achieve high clearing rates at comparatively high blower efficiency. A ceramic insulator located on either side of the cathode/pre-ionizer assembly enhances the flow of gas through the discharge region by reducing the turbulence in the electrode region. A series of specifically designed flow vanes further enhance the gas flow. The gas exiting the blower fan is guided into the discharge region with one vane. The anode support bar is extended downwardly, thus improving the efficiency of the tangential blower and also minimizing the amount of gas bypassing the discharge region. A pair of vanes downstream from the discharge region smoothly direct the heated gas towards the heat exchanger.