Patents by Inventor Richard H. Broberg

Richard H. Broberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for normalizing error in photolithographic processes
    Patent number: 7957826
    Abstract: A method for fabricating parts using a photolithography system, includes: performing a search of normalization data for an estimated dose operating point; and using the estimated dose operating point for fabrication of new parts.
    Type: Grant
    Filed: August 21, 2007
    Date of Patent: June 7, 2011
    Assignee: International Business Machines Corporation
    Inventors: Christopher P. Ausschnitt, Richard H. Broberg, David A. Crow, William A. Muth, Keith E. Roberts
  • METHODS AND SYSTEMS FOR NORMALIZING ERROR
    Publication number: 20090053627
    Abstract: A method for fabricating parts using a photolithography system, includes: performing a search of normalization data for an estimated dose operating point; and using the estimated dose operating point for fabrication of new parts. Other methods are provided.
    Type: Application
    Filed: August 21, 2007
    Publication date: February 26, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Christopher P. Ausschnitt, Richard H. Broberg, David A. Crow, William A. Muth, Keith E. Roberts