Patents by Inventor Richard Hilliard Gaylord, III

Richard Hilliard Gaylord, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for removing contaminants from a workpiece using a chemically reactive additive
    Patent number: 6634371
    Abstract: An apparatus for drying one or more workpieces. The apparatus includes the use of a chemically reactive additive to remove contaminants from the wafer surface during processing. In particular, during processing, a wafer is rinsed in a liquid bath and subsequently exposed to a chemically reactive additive. The chemically reactive additive creates a surface tension gradient that physically and chemically alters the properties of the film of the rinse liquid so that the liquid and any contaminants contained therein are removed from the water surface.
    Type: Grant
    Filed: May 14, 2001
    Date of Patent: October 21, 2003
    Assignee: International Business Machines Corporation
    Inventors: Richard Hilliard Gaylord, III, Frederick William Kern, Jr., Donald Joseph Martin, Harald Franz Okorn-Schmidt, John Joseph Snyder, William Alfred Syverson
  • Method for removing contaminants from a workpiece using a chemically reactive additive
    Patent number: 6355111
    Abstract: A method for drying one or more workpieces. The method includes the use of a chemically reactive additive to remove contaminants from the wafer surface during processing. In particular, during processing, a wafer is rinsed in a liquid bath and subsequently exposed to a chemically reactive additive. The chemically reactive additive creates a surface tension gradient that physically and chemically alters the properties of the film of the rise liquid so that the liquid and any contaminants contained therein are removed from the wafer surface.
    Type: Grant
    Filed: November 24, 1999
    Date of Patent: March 12, 2002
    Assignee: International Business Machines Corporation
    Inventors: Richard Hilliard Gaylord, III, Frederick William Kern, Jr., Donald Joseph Martin, Harald Franz Okorn-Schmidt, John Joseph Snyder, William Alfred Syverson