Patents by Inventor Richard J. Dare

Richard J. Dare has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Linewidth metrology of integrated circuit structures
    Patent number: 5804460
    Abstract: Illustratively, the present invention includes a method of integrated circuit manufacturing which includes forming a raised topological feature upon a first substrate. A portion of the raised feature is removed, thereby exposing a cross sectional view of the raised feature with the substrate remaining substantially undamaged. The cross sectional view has a critical dimension. The critical dimension of the cross sectional view is measured using a first measuring instrument. Then the critical dimension is measured using a second measuring instrument. The measurements of the first and second measuring instruments are correlated. Then, using the second measuring instrument, raised features via plurality of second substrates are measured.
    Type: Grant
    Filed: September 15, 1997
    Date of Patent: September 8, 1998
    Assignee: Lucent Technologies, Inc.
    Inventors: Jeffrey Bruce Bindell, Dennis Earl Schrope, Fred Anthony Stevie, Richard J. Dare, Larry E. Plew