Patents by Inventor Richard J. Freeman

Richard J. Freeman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching system and etching chamber
    Patent number: 6558506
    Abstract: The present invention provides an etching system having a plurality of etching chambers (16, 18, 20) disposed about a transfer chamber (14), wherein the etching chambers are adapted to be selectively mounted at different positions with respect to the transfer chamber.
    Type: Grant
    Filed: October 24, 2001
    Date of Patent: May 6, 2003
    Assignee: Tokyo Electron Limited
    Inventors: Richard J. Freeman, Jay R. Wallace, Yoichi Kurono, Arthur H. Laflamme, Jr., Louise Smith Barriss, Tadashi Onishi