Abstract: An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.

Abstract: A RF field sensor in which a magnetostrictive film is deposited on one or more electrodes of one or more quartz resonator(s) in which an electric field of the RF field is detected along one axis of the RF field sensor and a magnetic field of the RF field is detected along an orthogonal axis of the RF field sensor simultaneously.

Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.

Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.

Abstract: An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.

Abstract: A geopositioning system. The geopositioning system includes an accelerometer including three sensing axes, a gyroscope including three sensing axes, and a magnetometer including three sensing axes, and a processing circuit. The processing circuit is configured to calculate a location of the geopositioning system as a latitude, longitude, and altitude with respect to the Earth.

Abstract: An angular sensor. The angular sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first pair of normal modes including a first normal mode and a second normal mode and a second pair of normal modes including a third normal mode and a fourth normal mode. The angular sensor further includes a coarse readout circuit configured to drive the first pair of modes, measure the motion of the first pair of modes, and derive from the measured motion of the first pair of modes a coarse measurement of an angular rate of the resonator. The angular sensor further includes and a fine readout circuit configured to derive a measurement of the difference between the true angular rate of the resonator and the coarse measurement.

Abstract: A gyroscope includes a cylindrical shell having a first end and a second end, a pedestal, a plurality of spokes coupled from the pedestal to the second end of the cylindrical shell, and a plurality of tuning tabs extending from one or more of the plurality of spokes.

Abstract: A RF field sensor in which a magnetostrictive film is deposited on one or more electrodes of one or more quartz resonator(s) in which an electric field of the RF field is detected along one axis of the RF field sensor and a magnetic field of the RF field is detected along an orthogonal axis of the RF field sensor simultaneously.

Abstract: A method for fabricating a Microelectromechanical System (MEMS) resonator includes providing a dielectric substrate defining a resonator and depositing a conductive coating having a resistivity of approximately 1 to 50 ??-cm on that substrate by Atomic Layer Deposition (ALD). A resonator fabricated according to this process includes a dielectric substrate defining a resonator and a conductive coating having a resistivity of approximately 1 to 50 ??-cm for electrically coupling the resonator to electronics. Another method for fabricating a MEMS resonator includes providing a dielectric substrate defining a resonator, depositing an aluminum oxide film on that substrate by ALD, and depositing a noble metal film on the aluminum oxide film, also by ALD.

Abstract: A gyroscope includes a vibratory structure, and a control mechanism including at least a first electrode, and at least a second electrode adjacent the first electrode, wherein the vibratory structure is separated from the control mechanism by a gap, wherein to drive a vibration in the vibratory structure, the control mechanism is configured to apply an alternating electrical voltage between the first electrode and the second electrode, and wherein to sense motion in the vibratory structure, the control mechanism is configured to apply a direct current voltage bias between the first electrode and the second electrode.

Abstract: A magnetometer has a resonating structure which is naturally resonant in at least first and second resonant modes, a resonant frequency of the second mode being at least an order of magnitude greater than a resonant frequency of the first mode, the resonating structure having two sense electrodes disposed on opposing major surfaces of the resonating structure and having a conductive path formed as a loop, the loop being disposed near or at edges of the resonating structure and the two sense electrodes being formed inwardly of the edges of the resonating structure and also inwardly of said loop.

Abstract: A geopositioning system. The geopositioning system includes an accelerometer including three sensing axes, a gyroscope including three sensing axes, and a magnetometer including three sensing axes, and a processing circuit. The processing circuit is configured to calculate a location of the geopositioning system as a latitude, longitude, and altitude with respect to the Earth.

Abstract: A gyroscope including a dielectric resonator, a laser vibrometer on a first side of the dielectric resonator, and a laser dump for redirecting or absorbing light received at the laser dump from the laser vibrometer, the laser dump on a second side of the dielectric resonator. A first distance between the dielectric resonator and the laser vibrometer ranges from 10 nm to 20 ?m, and a second distance between the dielectric resonator and the laser dump ranges from 10 nm to 20 ?m.

Abstract: A MEMS assembly comprising a substrate and a MEMS device; wherein the MEMS device is connected to the substrate by at least two flexible support structures made in a conductive layer formed on a first portion of one of the substrate and the MEMS.

Abstract: A method for reducing the phase noise of a oscillator includes monitoring a phase slope of a resonator, and controlling the resonator to operate the resonator at a high phase slope condition, wherein the resonator comprises a piezoelectric material, or piezoelectric quartz.

Abstract: Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.

Abstract: A method for locating and eliminating defects on a substrate wafer includes illuminating a top surface of the substrate wafer with a first illumination source, illuminating a bottom surface of the substrate wafer with a second illumination source, forming an image of a portion of the top surface of the substrate wafer while the substrate wafer is illuminated by the first and second illumination sources, adjusting a contrast of the image to accentuate defects on the top surface of the substrate wafer, locating defects in the image, and ablating the defects on the top surface with a laser.

Abstract: A method for locating and eliminating defects on a substrate wafer includes illuminating a top surface of the substrate wafer with a first illumination source, illuminating a bottom surface of the substrate wafer with a second illumination source, forming an image of a portion of the top surface of the substrate wafer while the substrate wafer is illuminated by the first and second illumination sources, adjusting a contrast of the image to accentuate defects on the top surface of the substrate wafer, locating defects in the image, and ablating the defects on the top surface with a laser.

Abstract: Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.