Patents by Inventor Richard J. McGovern

Richard J. McGovern has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing apparatus employing a textured focus ring
    Patent number: 5474649
    Abstract: The invention is directed to a focus ring for surrounding a workpiece/surface substrate during plasma processing comprising a hollow annular assembly comprised of electrically insulating material and having a texturized surface. The texturized ring is preferably in the geometry of a generally cylindrical structure. The texturizing of the ring can be effected by any means of surface abrasion including bead blasting or chemical etching.
    Type: Grant
    Filed: March 8, 1994
    Date of Patent: December 12, 1995
    Assignee: Applied Materials, Inc.
    Inventors: Joseph Kava, Richard J. McGovern, Greg A. Blackburn