Patents by Inventor Richard J. Young
Richard J. Young has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20120187285Abstract: A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create TEM and STEM samples by using a precise endpoint detection method. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide methods for endpointing sample thinning and methods to partially or fully automate endpointing.Type: ApplicationFiled: April 6, 2012Publication date: July 26, 2012Applicant: FEI COMPANYInventors: RICHARD J. YOUNG, BRENNAN PETERSON, RUDOLF JOHANNES PETER GERARDUS SCHAMPERS, MICHAEL MORIARTY
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Patent number: 8170832Abstract: A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create TEM samples by using a precise endpoint detection method. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide methods for endpointing sample thinning and methods to partially or fully automate endpointing.Type: GrantFiled: November 2, 2009Date of Patent: May 1, 2012Assignee: FEI CompanyInventors: Richard J. Young, Brennan Peterson, Rudolf Johannes Peter Gerardus Schampers, Michael Moriarty
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Publication number: 20120045097Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. This invention demonstrates a method where high accuracy navigation to the site of interest within a relatively large local area (e.g. an area 200 ?m×200 ?m) is possible even where the stage/navigation system is not normally capable of such high accuracy navigation. The combination of large area, high-resolution scanning, digital zoom and registration of the image to an idealized coordinate system enables navigation around a local area without relying on stage movements. Once the image is acquired any sample or beam drift will not affect the alignment. Preferred embodiments thus allow accurate navigation to a site on a sample with sub-100 nm accuracy, even without a high-accuracy stage/navigation system.Type: ApplicationFiled: October 31, 2011Publication date: February 23, 2012Applicant: FEI COMPANYInventors: RICHARD J. YOUNG, CHAD RUE, PETER D. CARLESON
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Patent number: 8059918Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. This invention demonstrates a method where high accuracy navigation to the site of interest within a relatively large local area (e.g. an area 200 ?m×200 ?m) is possible even where the stage/navigation system is not normally capable of such high accuracy navigation. The combination of large area, high-resolution scanning, digital zoom and registration of the image to an idealized coordinate system enables navigation around a local area without relying on stage movements. Once the image is acquired any sample or beam drift will not affect the alignment. Preferred embodiments thus allow accurate navigation to a site on a sample with sub-100 nm accuracy, even without a high-accuracy stage/navigation system.Type: GrantFiled: October 11, 2009Date of Patent: November 15, 2011Assignee: FEI CompanyInventors: Richard J. Young, Chad Rue, Peter D. Carleson
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Publication number: 20100224592Abstract: Electron-beam-induced chemical reactions with precursor gases are controlled by adsorbate depletion control. Adsorbate depletion can be controlled by controlling the beam current, preferably by rapidly blanking the beam, and by cooling the substrate. The beam preferably has a low energy to reduce the interaction volume. By controlling the depletion and the interaction volume, a user has the ability to produce precise shapes.Type: ApplicationFiled: March 8, 2010Publication date: September 9, 2010Applicant: FEI COMPANYInventors: MILOS TOTH, Richard J. Young, Alexander Henstra, Alan Frank de Jong, Johannes Jacobus Lambertus Mulders
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Publication number: 20100116977Abstract: An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.Type: ApplicationFiled: November 2, 2009Publication date: May 13, 2010Applicant: FEI COMPANYInventors: Richard J. Young, Brennan Peterson, Rudolf Johannes Peter Gerardus Schampers, Michael Moriarty
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Publication number: 20100092070Abstract: An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing. This invention demonstrates a method where high accuracy navigation to the site of interest within a relatively large local area (e.g. an area 200 ?m×200 ?m) is possible even where the stage/navigation system is not normally capable of such high accuracy navigation. The combination of large area, high-resolution scanning, digital zoom and registration of the image to an idealized coordinate system enables navigation around a local area without relying on stage movements. Once the image is acquired any sample or beam drift will not affect the alignment. Preferred embodiments thus allow accurate navigation to a site on a sample with sub-100 nm accuracy, even without a high-accuracy stage/navigation system.Type: ApplicationFiled: October 11, 2009Publication date: April 15, 2010Applicant: FEI COMPANYInventors: RICHARD J. YOUNG, Chad Rue, Peter D. Carleson
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Patent number: 6949756Abstract: A method and apparatus for providing a shaped ion beam having low current density and sharp edges. The low current density and sharp edges eliminate the problem of overmilling, while permitting rapid ion beam processing. One method of producing the shaped beam is by using a two lens system, the first lens imaging the source onto the plane of the second lens and the second lens forming an image of the aperture onto the target plane. Another method is to greatly underfocus a chromatic aberration limited beam. Large beams having uniform current density and sharp edges can be produced. A knife edge beam, having a sharp edge can also be produced.Type: GrantFiled: January 19, 2001Date of Patent: September 27, 2005Assignee: FEI CompanyInventors: Robert L. Gerlach, Mark W. Utlaut, Paul P. Tesch, Richard J. Young, Clive D. Chandler, Karl D. van der Mast
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Publication number: 20010045525Abstract: A method and apparatus for providing a shaped ion beam having low current density and sharp edges. The low current density and sharp edges eliminate the problem of overmilling, while permitting rapid ion beam processing. One method of producing the shaped beam is by using a two lens system, the first lens imaging the source onto the plane of the second lens and the second lens forming an image of the aperture onto the target plane. Another method is to greatly underfocus a chromatic aberration limited beam. Large beams having uniform current density and sharp edges can be produced. A knife edge beam, having a sharp edge can also be produced.Type: ApplicationFiled: January 19, 2001Publication date: November 29, 2001Inventors: Robert L. Gerlach, Mark W. Utlaut, Paul P. Tesch, Richard J. Young, Clive D. Chandler, Karl D. van der Mast
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Patent number: 5924437Abstract: A kit for the emergency shutoff of a fire hydrant after the hydrant stem has failed and a cap of the hydrant nozzle has been removed so that a jet of water is escaping from the hydrant. The kit comprises a two-part increaser and a shutoff valve. The two parts of the increaser are brought together from opposing sides of the water jet and fastened to the hydrant nozzle. The increaser has a flange that mates with the flange on the shutoff valve. The bottom of the flange of the valve is bolted to the top of the flange of the increaser until secure but not tight. Then the shutoff valve is dropped so that it rotates into position, momentarily intersecting the jet of water. Once in place, the shutoff valve is tightened and the water shut off by closing the valve.Type: GrantFiled: July 17, 1998Date of Patent: July 20, 1999Inventor: Richard J Young
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Patent number: 5541411Abstract: An image-to-image registration system employs interactive computer graphic systems to align and register a number of image representations of a particular device from a variety of sources including, for example, optical microscopic images, computer aided design representations, etc., to an image obtained by a focused ion beam system. The registration enables accurate alignment of the images to the FIB image so that subsurface features which may not be detectable via the FIB image may be located and used to guide operation of the FIB system for milling or conductor/insulator deposition or the like. Counting of aluminum grains is enhanced by use of the invention to register images of a sample taken at several different tilt angles. The registered images are combined to give a more accurate representation of grain boundaries, enabling a more accurate grain count.Type: GrantFiled: July 6, 1995Date of Patent: July 30, 1996Assignee: FEI CompanyInventors: John M. Lindquist, Richard J. Young, Eric S. Boleyn
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Patent number: 3937284Abstract: A thermally sensitive stored chemical energy capsule is formed in the heat collector or attached to the fusible link of existing thermally sensitive sprinkler heads for activating individual sprinkler heads by heat generated by the intermingling of the capsule contained chemicals.Type: GrantFiled: September 30, 1974Date of Patent: February 10, 1976Inventor: Richard J. Young