Patents by Inventor Richard Jon Jenkins

Richard Jon Jenkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Use of CMP for aluminum mirror and solar cell fabrication
    Patent number: 8062096
    Abstract: The invention is directed to a method of polishing a surface of a substrate comprising aluminum, comprising contacting a surface of the substrate with a polishing pad and a polishing composition comprising an abrasive, an agent that oxidizes aluminum, and a liquid carrier, and abrading at least a portion of the surface to remove at least some aluminum from the substrate and to polish the surface of the substrate, wherein the abrasive is in particulate form and is suspended in the liquid carrier.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: November 22, 2011
    Assignee: Cabot Microelectronics Corporation
    Inventors: Vlasta Brusic, Richard Jon Jenkins, Christopher C. Thompson