Abstract: Described herein are techniques for supplying radio frequency (RF) power to a large area plasma source so as to produce a plasma that is substantially uniform in two spatial dimensions. The RF power may be supplied by a power supply system, which may comprise a RF source and a distribution network. The distribution network may comprise a matching network, and a branching circuit that divides the RF power into several branches. Each of the branches of the distribution network may include a phase shifter that shifts the RF signal (which carries the RF power) by an odd multiple of 90°, and a blocking filter which blocks any harmonics and other unwanted frequencies which are reflected from a plasma source. The output of the branches may be coupled to feed points that are spatially distributed over the one or more electrodes of the plasma source.

Abstract: A frequency multiplexer is disclosed. The frequency multiplexer comprises a lumped element transmission line comprising a plurality of inductances and capacitances, and a band pass filter coupled to a node of the lumped element transmission line, where the band pass filter includes a branch port that is coupled to the lumped element transmission line at a pass band of the band pass filter, and where the band pass filter exhibits a capacitive impedance in a stop band of the band pass filter. The band pass filter may comprise a series resonant circuit and a parallel resonant circuit, where the parallel resonant circuit is parallel resonant at nominally the same frequency at which the series resonant circuit is series resonant.

Abstract: A frequency multiplexer is disclosed. The frequency multiplexer comprises a lumped element transmission line comprising a plurality of inductances and capacitances, and a band pass filter coupled to a node of the lumped element transmission line, where the band pass filter includes a branch port that is coupled to the lumped element transmission line at a pass band of the band pass filter, and where the band pass filter exhibits a capacitive impedance in a stop band of the band pass filter. The band pass filter may comprise a series resonant circuit and a parallel resonant circuit, where the parallel resonant circuit is parallel resonant at nominally the same frequency at which the series resonant circuit is series resonant.