Patents by Inventor Richard Lee Hendrickson

Richard Lee Hendrickson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for improved gas delivery
    Publication number: 20040065256
    Abstract: An improved chemical vapor deposition system including a lid having a channel configured for delivering reactive cleaning gas to the interior of the vapor deposition system. The lid including a cleaning gas distribution channel fluidly connected to a plurality of cleaning gas injection ports. The lid geometry is configured to generate desirable concentration gradients of reactive cleaning gas to the interior of a vapor deposition chamber. In some embodiments, the concentration gradient is selected to compensate for the temperature dependence of cleaning reactions. Methods of using the disclose system are disclosed.
    Type: Application
    Filed: October 2, 2003
    Publication date: April 8, 2004
    Inventors: Gi Youl Kim, Marbert G. Moore, Adrian Jansz, David K. Foote, Richard Lee Hendrickson, Ken Doering