Abstract: A microfluidic cartridge is provided. The microfluidic cartridge has a reservoir configured to contain a fluid composition. The microfluidic cartridge has a first face with a first opening and a second opening. The microfluidic cartridge also includes a second face joined with the first face, a third face joined with the second face and opposing the first face, and a fourth face joined with the third face and the first face and opposing the second face. The fourth face has a connector. The microfluidic cartridge has an electrical circuit with a first end portion disposed on the first face and a second end portion disposed on the second face. The microfluidic cartridge also includes a microfluidic die disposed on the second face. The microfluidic die is in electrical communication with the electrical circuit and in fluid communication with the reservoir.

Abstract: A microfluidic cartridge is provided. The microfluidic cartridge has a reservoir configured to contain a fluid composition. The microfluidic cartridge has a first face with a first opening and a second opening. The microfluidic cartridge also includes a second face joined with the first face, a third face joined with the second face and opposing the first face, and a fourth face joined with the third face and the first face and opposing the second face. The fourth face has a connector. The microfluidic cartridge has an electrical circuit with a first end portion disposed on the first face and a second end portion disposed on the second face. The microfluidic cartridge also includes a microfluidic die disposed on the second face. The microfluidic die is in electrical communication with the electrical circuit and in fluid communication with the reservoir.

Abstract: A microfluidic cartridge is provided. The microfluidic cartridge is configured to be releasably connectable with a microfluidic delivery device. The microfluidic cartridge has a reservoir configured to contain a fluid composition. The microfluidic cartridge has a first face with a first opening and a second opening. The microfluidic cartridge also includes a second face joined with the first face, a third face joined with the second face and opposing the first face, and a fourth face joined with the third face and the first face and opposing the second face. The fourth face has a connector. The microfluidic cartridge has an electrical circuit with a first end portion disposed on the first face and a second end portion disposed on the second face. The microfluidic cartridge also includes a microfluidic die disposed on the second face. The microfluidic die is in electrical communication with the electrical circuit and in fluid communication with the reservoir.

Abstract: Methods for processing wafers, wafer processing apparatus, micro-fluid ejection head substrates, and etching process are provided. One such method includes applying a clamping voltage to an electrostatic chuck sufficient to hold a wafer in a substantially planerized orientation adjacent to the electrostatic chuck. A heat transfer fluid flows through a three dimensional space between the wafer and the electrostatic chuck to cool the wafer by convective heat transfer during wafer processing.