Abstract: An apparatus and process for recovering a desired gas such as xenon difluoride, xenon, argon, helium or neon, from the effluent of a chemical process reactor that utilizes such gases alone or in a gas mixture or in a molecule that becomes decomposed wherein the chemical process reactor uses a sequence of different gas composition not all of which contain the desired gas and the desired gas is captured and recovered substantially only during the time the desired gas is in the effluent.

Abstract: An apparatus and process for recovering a desired gas such as xenon difluoride, xenon, argon, helium or neon, from the effluent of a chemical process reactor that utilizes such gases alone or in a gas mixture or in a molecule that becomes decomposed wherein the chemical process reactor uses a sequence of different gas composition not all of which contain the desired gas and the desired gas is captured and recovered substantially only during the time the desired gas is in the effluent.

Abstract: A tool and a method for installing a seal in a fitting through which gas is flowing is disclosed. The tool has a sleeve with a first socket that receives and holds the seal, and a second socket, adjacent to the first, that receives the fitting. A shaft is axially movable within the sleeve and has a contact surface at one end engageable with the seal. The shaft has a conduit with an inlet in communication with the fitting and an outlet that vents to the atmosphere. The seal is loaded into the first socket, the second socket is engaged with the fitting, and the shaft is advanced to push the seal from the first socket into the fitting. Gas flowing through the fitting is conducted to the atmosphere by the conduit, preventing gas pressure build-up behind the seal.

Abstract: Valve assembly comprising a valve base, a valve bonnet attached thereto, a rotatable valve stem extending coaxially through the valve bonnet, a rotatable valve handle attached to the valve stem and having a plane of rotation which is generally perpendicular to the axis of the valve stem, and an indicator tab attached to the valve base or the valve bonnet and extending outward from the valve body or valve bonnet in a direction generally parallel to the plane of rotation of the valve handle. The rotatable valve handle can be disposed in at least a first position and a second position, wherein the rotatable handle when disposed in the first position renders the indicator tab invisible when viewed in a direction generally perpendicular to the plane of rotation of the valve handle, and wherein the rotatable handle when disposed in the second position renders the indicator tab visible when viewed in a direction generally perpendicular to the plane of rotation of the valve handle.

Abstract: The present invention is an apparatus and process for blending high purity chemicals to produce a high purity chemical mixture with circulation, purification and sensing of said chemical mixture between blending of said high purity chemicals and storage of said high purity chemicals for use, ultimately to produce a high purity chemical mixture for on-site use in treating semiconductor materials, such as at a semiconductor fabrication facility that processes silicon wafers.