Abstract: A method for forming a crosslinked polymer by selective urethane bond formation by temperature control.

Abstract: The present invention is directed to methods and systems for calibrating integrated metrology systems and stand-alone metrology systems that acquire wafer state data. In one illustrative embodiment, the method includes providing a plurality of process tools, each of the process tools comprising an integrated metrology system adapted to obtain wafer state data, and providing a plurality of stand-alone metrology tools, each of which are adapted to obtain wafer state data. The method further comprises processing at least one wafer through each of the process tools and each of the stand-alone metrology tools, wherein wafer state data for at least one wafer is acquired in each of the process tools and in each of the stand-alone metrology tools, and calibrating the integrated metrology system in at least one of the process tools or at least one of the stand-alone metrology tools based upon the wafer state data acquired for the wafer.

Abstract: The present invention is generally directed to fault detection and control methodologies for ion implant processes, and a system for performing same. In one illustrative embodiment, the method comprises performing a tuning process for an ion implant tool, the tuning process resulting in at least one tool parameter for the ion implant tool, selecting or creating a fault detection model for an ion implant process to be performed in the ion implant tool based upon the tool parameter resulting from the tuning process, and monitoring an ion implant process performed in the ion implant tool using the selected or created fault detection model.