Patents by Inventor Richard Mars Ruggiero

Richard Mars Ruggiero has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rotary signal coupling for chemical mechanical polishing endpoint detection with a strasbaugh tool
    Patent number: 5770948
    Abstract: An apparatus for rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process by a polisher is provided with a sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process, a conductor coupled to the sensor for receiving the signal, the conductor fixed to the rotatable wafer carrier, a contact coupled to the conductor, the contact fixed to a stationary drive arm, and signal transfer means coupled to the contact for transferring the signal to a monitoring means.
    Type: Grant
    Filed: March 19, 1996
    Date of Patent: June 23, 1998
    Assignee: International Business Machines Corporation
    Inventors: Leping Li, Steven George Barbee, Arnold Halperin, Richard Mars Ruggiero, William Joseph Surovie