Patents by Inventor Richard McKissick

Richard McKissick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MODULAR MICROWAVE SOURCE WITH INTEGRATED OPTICAL SENSORS
    Publication number: 20240153795
    Abstract: Embodiments disclosed herein include a semiconductor processing tool. In an embodiment, the semiconductor processing tool comprises a chamber, and a lid configured to seal the chamber. In an embodiment, a modular microwave plasma applicator is provided through the lid, and an optical port is provided through the lid and adjacent to the modular microwave plasma source. In an embodiment, a pin is inserted in the optical port.
    Type: Application
    Filed: November 4, 2022
    Publication date: May 9, 2024
    Inventors: Adam Fischbach, Richard McKissick, Brian Hatcher, Christian Valencia, Thai Cheng Chua, Philip Allan Kraus