Patents by Inventor Richard Pasta

Richard Pasta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon nitride passivation layers having oxidized interface
    Publication number: 20070164390
    Abstract: A method of forming a passivation film on a semiconductor substrate is provided and includes forming a first silicon nitride containing layer on the substrate, oxidizing the surface of the first silicon nitride containing layer, and forming a second silicon nitride containing layer on the oxidized surface of the first silicon nitride containing layer. The oxidized surface may be formed by exposing the first silicon nitride containing layer to an oxygen containing gas plasma.
    Type: Application
    Filed: December 7, 2006
    Publication date: July 19, 2007
    Inventors: Irina Vasilyeva, Richard Pasta
  • Silicon nitride passivation layers having oxidized interface
    Publication number: 20070012661
    Abstract: A method of forming a passivation film on a semiconductor substrate is provided and includes forming a first silicon nitride containing layer on the substrate, oxidizing the surface of the first silicon nitride containing layer, and forming a second silicon nitride containing layer on the oxidized surface of the first silicon nitride containing layer. The oxidized surface may be formed by exposing the first silicon nitride containing layer to an oxygen containing gas plasma.
    Type: Application
    Filed: July 13, 2005
    Publication date: January 18, 2007
    Inventors: Irina Vasilyeva, Richard Pasta