Patents by Inventor Richard Phaler

Richard Phaler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUPPORT ASSEMBLY FOR USE IN SEMICONDUCTOR MANUFACTURING TOOLS WITH A FUSIBLE BOND
    Publication number: 20150004400
    Abstract: A support assembly includes a first functional element, a second functional element adjacent to the cooling plate, and an adhesive layer disposed between the cooling plate and the substrate. An intermediate layer is disposed between the cooling plate and the substrate. The intermediate layer has a melting temperature less than a temperature that the adhesive layer melts or decomposes at in order to provide for recycling of the support assemblycar.
    Type: Application
    Filed: June 28, 2013
    Publication date: January 1, 2015
    Inventors: John Lilleland, Richard Phaler