Abstract: A RF power supply system for delivering periodic RF power to a load. A power amplifier outputs a RF signal to the load. A sensor measures the RF signal provided to the load and outputs signals that vary in accordance with the RF signal. A first feedback loop enables control the RF signal based upon power determined in accordance with output from the sensor. A second feedback loop enables control the RF signal based upon energy measured in accordance with signals output from the sensor. Energy amplitude and duration provide control values for varying the RF signal. The control system and techniques are applicable to both pulsed RF power supplies and in various instances to continuous wave power supplies.

Abstract: A radio frequency (RF) system includes a control module that allocates M predetermined frequency intervals. The system also includes N RF sources that each applies first RF power to electrodes within a plasma chamber at frequencies within an assigned respective one of the M predetermined frequency intervals. The N RF sources also each respond to second RF power including feedback from the plasma chamber. The N RF sources each include a processing module that adjusts the first RF power based on the second RF power and the respective one of the M predetermined frequency intervals. M and N are integers greater than 1.

Abstract: A radio frequency (RF) system includes a control module that allocates M predetermined frequency intervals. The system also includes N RF sources that each applies first RF power to electrodes within a plasma chamber at frequencies within an assigned respective one of the M predetermined frequency intervals. The N RF sources also each respond to second RF power including feedback from the plasma chamber. The N RF sources each include a processing module that adjusts the first RF power based on the second RF power and the respective one of the M predetermined frequency intervals. M and N are integers greater than 1.

Abstract: An information handling system having an integrated internal scalable switching storage system is disclosed. The information handling system includes a housing, a processor disposed in the housing and a memory device for storing a program of instructions executable by the processor. A bus of the information handling system is disposed in the housing, and the processor and the memory are coupled to the bus. A host bus adapter is coupled to the bus and is disposed in the housing. An information storage system is in turn coupled to the host bus adapter and is also disposed in the housing. The information storage system includes a backplane for coupling at least one information storage device to the host bus adapter. The information storage system and host bus adapter are preferably compliant with a scalable, switching, mass storage system standard such as Fiber Channel.

Abstract: An information handling system having an integrated internal scalable switching storage system is disclosed. The information handling system includes a housing, a processor disposed in the housing and a memory device for storing a program of instructions executable by the processor. A bus of the information handling system is disposed in the housing, and the processor and the memory are coupled to the bus. A host bus adapter is coupled to the bus and is disposed in the housing. An information storage system is in turn coupled to the host bus adapter and is also disposed in the housing. The information storage system includes a backplane for coupling at least one information storage device to the host bus adapter. The information storage system and host bus adapter are preferably compliant with a scalable, switching, mass storage system standard such as Fibre Channel.

Abstract: An information handling system having an integrated internal scalable switching storage system is disclosed. The information handling system includes a housing, a processor disposed in the housing and a memory device for storing a program of instructions executable by the processor. A bus of the information handling system is disposed in the housing, and the processor and the memory are coupled to the bus. A host bus adapter is coupled to the bus and is disposed in the housing. An information storage system is in turn coupled to the host bus adapter and is also disposed in the housing. The information storage system includes a backplane for coupling at least one information storage device to the host bus adapter. The information storage system and host bus adapter are preferably compliant with a scalable, switching, mass storage system standard such as Fibre Channel.

Abstract: An information handling system having an integrated internal scalable switching storage system is disclosed. The information handling system includes a housing, a processor disposed in the housing and a memory device for storing a program of instructions executable by the processor. A bus of the information handling system is disposed in the housing, and the processor and the memory are coupled to the bus. A host bus adapter is coupled to the bus and is disposed in the housing. An information storage system is in turn coupled to the host bus adapter and is also disposed in the housing. The information storage system includes a backplane for coupling at least one information storage device to the host bus adapter. The information storage system and host bus adapter are preferably compliant with a scalable, switching, mass storage system standard such as Fibre Channel.

Abstract: An information handling system having an integrated internal scalable switching storage system is disclosed. The information handling system includes a housing, a processor disposed in the housing and a memory device for storing a program of instructions executable by the processor. A bus of the information handling system is disposed in the housing, and the processor and the memory are coupled to the bus. A host bus adapter is coupled to the bus and is disposed in the housing. An information storage system is in turn coupled to the host bus adapter and is also disposed in the housing. The information storage system includes a backplane for coupling at least one information storage device to the host bus adapter. The information storage system and host bus adapter are preferably compliant with a scalable, switching, mass storage system standard such as Fiber Channel.