Abstract: A resonant coil system with improved sensitivity and signal-to-noise performance is described. A primary coil is tuned to a first resonance frequency and inductively coupled to a secondary coil that is separately tuned to a second resonance frequency. The primary and secondary coils form a resonant system with a resonance frequency that is a function of the primary and secondary coil resonance frequencies. The resonance frequency of the coil system is less than both the primary resonance frequency and the secondary resonance frequency. The mutual inductance between the two coils is high and the resonance frequency of the coil system's parallel mode is well separated from that of the anti-parallel mode.

Abstract: A resonant coil system with improved sensitivity and signal-to-noise performance is described. A primary coil is tuned to a first resonance frequency and inductively coupled to a secondary coil that is separately tuned to a second resonance frequency. The primary and secondary coils form a resonant system with a resonance frequency that is a function of the primary and secondary coil resonance frequencies. The resonance frequency of the coil system is less than both the primary resonance frequency and the secondary resonance frequency. The mutual inductance between the two coils is high and the resonance frequency of the coil system's parallel mode is well separated from that of the anti-parallel mode.

Abstract: An apparatus and method for triaging patients according to radiation exposure operates by measuring electron paramagnetic resonance spectra of fingernails, toenails, and/or teeth. A coil structure allows in vivo measurement of tooth enamel or fingernail keratin with reduced coupling to underlying tissue.

Abstract: An apparatus and method for triaging patients according to radiation exposure operates by measuring electron paramagnetic resonance spectra of fingernails, toenails, and/or teeth. A coil structure allows in vivo measurement of tooth enamel or fingernail keratin with reduced coupling to underlying tissue.

Abstract: A uniform-field resonator includes a central cavity section having a cross-section which is set to the cutoff frequency for a particular microwave propagation mode and a pair of end sections which enclose the cavity to form a resonator in which the field is substantially uniform along the entire length of the central cavity—regardless of its length. A number of end section design strategies and resulting structures are described for supporting the uniform-field mode of operation in the central cavity section.

Abstract: A substrate support comprises an electrode and a dielectric layer covering the electrode, the dielectric layer having a surface to receive a substrate. A gas feed-through provides a gas to the surface of the dielectric layer and comprises a conduit extending through one or more of the dielectric layer and electrode. A dielectric insert in the gas feed-through has a passage therein that allows the gas to be flowed therethrough. Two opposing electrically conducting cups are around the passage in the dielectric insert.

Abstract: The present invention provides a safety guard for a type-N coaxial connector that prevents casual human contact with a conductive center pin of the coaxial cable. The safety guard is preferably made of a dielectric material and is generally tubular in shape. The safety guard is adapted to be installed on existing connectors in the field, or to be part of a connector assembly that is to be installed on a coaxial cable. Among the advantages of the present invention are substantial reduction in complexity over prior art interlock connector designs. The safety guard of the present invention is provided for a male connector only, thereby alleviating the need for modification of the mating female connector.

Abstract: A substrate support comprises an electrode and a dielectric layer covering the electrode, the dielectric layer having a surface to receive a substrate. A gas feed-through provides a gas to the surface of the dielectric layer and comprises a conduit extending through one or more of the dielectric layer and electrode. A dielectric insert in the gas feed-through has a passage therein that allows the gas to be flowed therethrough. Two opposing electrically conducting cups are around the passage in the dielectric insert.

Abstract: A uniform-field resonator includes a central cavity section having a cross-section which is set to the cutoff frequency for a particular microwave propagation mode and a pair of end sections which enclose the cavity to form a resonator in which the field is substantially uniform along the entire length of the central cavity—regardless of its length. A number of end section design strategies and resulting structures are described for supporting the uniform-field mode of operation in the central cavity section.

Abstract: A gas feed-through 150 to provide gas to a plasma chamber 10, comprises a dielectric insert 155 having a passage 160 that allows the gas to be flowed therethrough, and a electrically conducting cup 165 around a portion of the passage. The electrically conducting cup 165 is shaped to reduce plasma formation in the gas feed-through 150.

Abstract: The present invention provides a safety guard for a type-N coaxial connector that prevents casual human contact with a conductive center pin of the coaxial cable. The safety guard is preferably made of a dielectric material and is generally tubular in shape. The safety guard is adapted to be installed on existing connectors in the field, or to be part of a connector assembly that is to be installed on a coaxial cable. Among the advantages of the present invention are substantial reduction in complexity over prior art interlock connector designs. The safety guard of the present invention is provided for a male connector only, thereby alleviating the need for modification of the mating female connector.

Abstract: A method and apparatus for retaining a substrate, such as a semiconductor wafer, upon an electrostatic chuck within a semiconductor wafer processing system. Specifically, the invention contains high voltage, DC power supply that is capable of both sourcing and sinking current at any polarity of output voltage level. This power supply is coupled to at least one electrode of an electrostatic chuck. Consequently, the power supply can be used to dynamically control the chucking voltage in response to any indicia of optimal chucking including leakage current, wafer-to-chuck potential, backside gas leakage rate, and the like.

Abstract: A DC power supply having a pair of "piggybacked" voltage supplies, where a reference voltage supply provides a reference voltage for a variable voltage supply and each voltage supply is coupled to a current sink. The power supply is capable of sourcing and sinking current through a single output terminal when supplying a positive or negative output voltage with respect to ground.

Abstract: A diagnostic pedestal assembly for measuring ion current and DC bias voltage within a high-power plasma reaction chamber of a semiconductor wafer processing system. The diagnostic pedestal assembly contains an aperture located in a surface of the pedestal and a probe element that is supported within the aperture.

Abstract: A high efficiency radio frequency (RF) impedance matching network containing an "L-type" inductor-capacitor (LC) circuit where the capacitor is a variable capacitor coupled from an input port to ground and the inductor is a variable inductance inductor coupled from the input port to an output port. A blocking capacitor is provided between the inductor and the output port and a ceramic capacitor is coupled in parallel across the variable capacitor. The impedance match is tuned by physically adjusting tuning elements of both the inductor and capacitor. The variable inductor contains an improved inductor tuning element that optimizes current flow in the tuning elements and inductor. To further improve the efficiency of the matching network, the assembly uses an improved enclosure interior finish and various circuit optimization techniques that reduce contributions to match loop resistance.