Patents by Inventor Richard Simmons

Richard Simmons has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam inspection system and method
    Patent number: 5502306
    Abstract: There is disclosed numerous embodiments of a method and apparatus for a particle scanning system and an automatic inspection system. In each of these a particle beam is directed at the surface of a substrate for scanning that substrate. Also included are a selection of detectors to detect at least one of the secondary particles, back-scattered particles and transmitted particles from the substrate. The substrate is mounted on an x-y stage to provide it with at least one degree of freedom while the substrate is being scanned by the/particle beam. The substrate is also subjected to an electric field on it's surface to accelerate the secondary particles. The system also has the capability to accurately measure the position of the substrate with respect to the charged particle beam. Additionally, there is an optical alignment means for initially aligning the substrate beneath the,particle beam means.
    Type: Grant
    Filed: March 17, 1994
    Date of Patent: March 26, 1996
    Assignee: KLA Instruments Corporation
    Inventors: Dan Meisburger, Alan D. Brodie, Curt Chadwick, Anil Desai, Hans Dohse, Dennis Emge, John Greene, Ralph Johnson, Ming-Yie Ling, John McMurtry, Barry Becker, Ray Paul, Mike Robinson, Richard Simmons, David E. A. Smith, John Taylor, Lee Veneklasen, Dean Walters, Paul Wieczorek, Sam Wong, April Dutta, Surendra Lele, Kirkwood Rough, Henry Pearce-Percy, Jack Y. Jau, Chun C. Lin, Hoi T. Nguyen, Yen-Jen Oyang, Timothy L. Hutcheson, David J. Clark, Chung-Shih Pan, Chetana Bhaskar, Chris Kirk, Eric Munro
  • Fluid-pressure operated actuator with follow-up transmission
    Patent number: 3993418
    Abstract: A fluid-pressure operated actuator arrangement has a double-acting actuator device and a control valve. A three-element differential mechanism has two of its elements respectively drivingly connected to the control valve and the actuator device, and a third element resiliently coupled to an input lever. The input lever is frictionally restrained against movement. Relative movement between the lever and the third element, induced as a result of jamming the control valve, brakes the third element, increasing a torque which can be applied by the actuator device to the valve.
    Type: Grant
    Filed: July 21, 1975
    Date of Patent: November 23, 1976
    Assignee: Lucas Industries Limited
    Inventor: John Richard Simmons
  • Hydraulic actuating arrangement for aircraft control surfaces
    Patent number: 3955783
    Abstract: A hydraulic actuating arrangement for an aircraft control surface has a control circuit, responsive to a position selection input signal, for providing six nominally identical output control signals. Six pilot valves respectively responsive to the control signals provide six servo pressure signals to respective ones of six intermediate actuators. The intermediate actuators are resiliently coupled to each of two main hydraulic control valves. Three of the intermediate actuators and one of the main control valves are supplied from a first hydraulic pressure source, the remaining three intermediate actuators and the remaining main control valve being supplied from a second hydraulic pressure source. An output actuator is responsive to output pressures from either of the main control valves.
    Type: Grant
    Filed: December 4, 1974
    Date of Patent: May 11, 1976
    Assignee: Joseph Lucas (Industries) Limited
    Inventors: Stanley George Glaze, John Richard Simmons