Patents by Inventor Richard Thomas Greenlee

Richard Thomas Greenlee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS OF FORMING LAYERS
    Publication number: 20160208378
    Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for forming a layer thereon; directing a particle beam towards the surface of the substrate, the particle beam including particles, wherein the particle beam has an angle of incidence with respect to the substrate, and is configured so that the particles have implant energies that are not greater than about 100 eV; changing the angle of incidence of the particle beam, the implant energy of the particles, or a combination thereof; and directing the particle beam towards the surface of the substrate a subsequent time, wherein the particles of the particle beam form a layer on the substrate.
    Type: Application
    Filed: November 18, 2015
    Publication date: July 21, 2016
    Inventors: Philip George Pitcher, Edwin Frank Rejda, Richard Thomas Greenlee
  • METHODS OF FORMING LAYERS
    Publication number: 20160138154
    Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including small molecule molecular species, wherein the small molecule molecular species break apart upon interaction with atoms at the substrate into atomic components, each of the atomic components having implant energies from about 20 eV to about 100 eV to form a layer.
    Type: Application
    Filed: November 30, 2015
    Publication date: May 19, 2016
    Inventors: Philip George Pitcher, Richard Thomas Greenlee, Huiwen Liu
  • METHODS OF FORMING LAYERS
    Publication number: 20130164453
    Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for forming a layer thereon; directing a particle beam towards the surface of the substrate, the particle beam including particles, wherein the particle beam has an angle of incidence with respect to the substrate, and is configured so that the particles have implant energies that are not greater than about 100 eV; changing the angle of incidence of the particle beam, the implant energy of the particles, or a combination thereof; and directing the particle beam towards the surface of the substrate a subsequent time, wherein the particles of the particle beam form a layer on the substrate.
    Type: Application
    Filed: April 5, 2012
    Publication date: June 27, 2013
    Applicant: SEAGATE TECHNOLOGY LLC
    Inventors: Philip George Pitcher, Edwin Frank Rejda, Richard Thomas Greenlee
  • METHODS OF FORMING LAYERS
    Publication number: 20130164454
    Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including small molecule molecular species, wherein the small molecule molecular species break apart upon interaction with atoms at the substrate into atomic components, each of the atomic components having implant energies from about 20 eV to about 100 eV to form a layer.
    Type: Application
    Filed: April 5, 2012
    Publication date: June 27, 2013
    Applicant: SEAGATE TECHNOLOGY LLC
    Inventors: Philip George Pitcher, Richard Thomas Greenlee, Huiwen Liu