Patents by Inventor Richard V. Chisholm

Richard V. Chisholm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Force sensing system for substrate lifting apparatus
    Patent number: 9108322
    Abstract: A system and method for monitoring forces on a substrate lifting apparatus. The system includes a platen cartridge with a platen and a movable lifting portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift pins. A plurality of force sensing elements are associated with respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: August 18, 2015
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Richard V. Chisholm, Scott E. Peitzsch, Michael Esposito, Robert A. Poitras, Steven M. Anella, Daniel A. Hall, Scott C. Holden, Roger B. Fish
  • FORCE SENSING SYSTEM FOR SUBSTRATE LIFTING APPARATUS
    Publication number: 20140324221
    Abstract: A system and method for monitoring forces on a substrate lifting apparatus. The system includes a platen cartridge with a platen and a movable lifting portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift pins. A plurality of force sensing elements are associated with respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction.
    Type: Application
    Filed: June 14, 2013
    Publication date: October 30, 2014
    Inventors: Richard V. Chisholm, Scott E. Peitzsch, Michael Esposito, Robert A. Poitras, Steven M. Anella, Daniel A. Hall, Scott C. Holden, Roger B. Fish