Patents by Inventor Richard V. Rafloski

Richard V. Rafloski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Linear conditioner apparatus for a chemical mechanical polishing system
    Patent number: 5938507
    Abstract: A conditioner apparatus uses one or more linear conditioners. The linear conditioners extend from the edge of the polishing pad almost to the center of the pad. The conditioner apparatus may use two conditioner rods located on either side of a radial segment. The rods gimbal so that if one rod rises, the other rod is forced downwardly. In addition, the rods can pivot independently about a lateral axis, but they cannot pivot around the vertical axis. The linear conditioners may be actuated by a piezoelectric member or swept by an arm toward and away from the center of the polishing pad.
    Type: Grant
    Filed: October 27, 1995
    Date of Patent: August 17, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Sen-Hou Ko, Richard V. Rafloski, James C. Nystrom, John Prince, Alfred A. Goldspiel, Stephen J. Blumenkranz, Manoocher Birang