Abstract: A gas delivery system comprises a gate valve that can be connected between a turbo pump and a process chamber. The gate valve includes a valve body, a valve seat and a housing constructed to support the valve seat, wherein (a) the valve body is secured within the housing so as to move relative to the valve seat between an opened position and a closed position, and (b) the housing is provided with a gas passageway connected to each of the spaces on opposite sides of the valve body when the valve body is in the closed position. A plurality of valves are mounted to the housing of the gate valve and arranged so as to control the flow of gas through the passageway so that in operation the chamber and turbo pump each can be pumped down through the gas passageway with a second pump connected to one of the valves, and gas can be transferred and the flow controlled through the passageway bypassing the valve body when the valve body is in the closed position.

Abstract: A pendulum valve assembly comprises a housing including an interior space and a pair of openings through which fluid can enter and exit the interior space; a valve seat disposed in the interior space around the edge of a first of the openings; a disk mounted relative to the housing so that the disk is movable within the interior space between a completely opened position and a completely closed position, the disk being constructed so that when the disk is moved to the closed position the disk engages the valve seat and seals the first opening so that fluid can not pass therethrough; a longitudinal shaft defining a longitudinal axis, fixedly coupled to the disk through at least one pivot arm and at least partially mounted within the housing so that (a) the shaft and disk can rotate about the longitudinal axis between a first angular position where the disk is in the completely opened position and a second angular position where the disk is substantially axially aligned with the first opening but spaced therefr

Abstract: A temperature control flow valve has a body defining conduits for connection to sources of cold and hot water, a chamber for mixing the water, and a thermostat element for maintaining the temperature of the mixed water at or below a predetermined maximum temperature. The cold and hot water are combined through a mixing valve in a ratio (adjusted continuously by means of the thermostat element) to provide the mixed water at the predetermined temperature. The flow valve includes cold water and hot water pressure regulators, the hot water regulator being responsive to the pressure of the cold water to maintain the pressure of the hot water delivered through the regulator substantially equal to the pressure of the cold water.