Abstract: A method and system for inspecting a photomask are provided. A method for automatically generating do-not-inspect regions in a photomask includes performing one or more manufacturing rules checks (MRCs) on a mask pattern file. The method may also include identifying manufacturing rule violations and automatically generating one or more DNIRs, each DNIR corresponding to a location of one or more of the identified manufacturing rule violations.

Abstract: A method and system for dispositioning defects in a photomask are provided. A method for dispositioning defects in a photomask includes analyzing photomask topography data including data representing a design topology of at least a first photomask, the first photomask corresponding to a first layer in a photolithographic process. Based at least on the analysis, one or more safe regions of the first photomask are identified, each safe region corresponding to a region of the first layer insensitive to potential defects located in the first photomask.