Abstract: An integral metal spacer for insulated glass units and method of fabricating the spacer. The spacer defines a substantially closed cross-section contour having a bottom surface, a pair of sidewalls, and a pair of generally abutting inner surfaces. A gap may be defined between the adjacent inner surfaces. The three interior corners are defined by fully mitered sidewalls. A pair of bridges are provided to integrally interconnect the inner surfaces of adjacent spacer segments. The method of fabricating includes taking a roll of flat metal stock and completely punching all corner and other structures therein while the stock is planar; severing the punched stock into individual spacer members; roll-forming the individual members into a finished linear spacer piece; applying desiccant, preferably a desiccant rope material during roll-forming; applying sealant; thereafter folding the elongate member into a square spacer thereby locking the desiccant therein.

Abstract: A vacuum loadlock is provided for housing a pair of wafers in proper alignment for concurrent processing. In one embodiment, a single chamber loadlock is provided with a gas diffuser disposed therein to decrease venting times within the loadlock. In another embodiment, a dual chamber loadlock is provided having first and second isolatable regions disposed adjacent a transfer region to increase throughput of the system.